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Specifications
Model |
VK-X3050 |
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Type |
Measurement head |
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Total magnification |
42 to 28800×*1 |
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Field of view |
11 to 7398 μm |
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Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
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Laser wavelength |
Semiconductor laser, 661 nm |
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Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
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Max. laser output |
1.0 mW |
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Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
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Laser light-receiving element |
16-bit photomultiplier |
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White light source |
White LED |
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White-light-receiving element |
High-definition color CMOS |
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Laser confocal |
Height display resolution |
1 nm |
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Height repeatability σ |
10×: 100 nm, 20×: 40 nm, 50×: 20 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
1 nm |
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Width repeatability 3σ |
10×: 400 nm, 20×: 100 nm, 50×: 50 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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Focus variation |
Height display resolution |
1 nm |
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Height repeatability σ |
5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
1 nm |
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Width repeatability 3σ |
5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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White light interferometry |
Height display resolution |
0.01 nm |
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Width display resolution |
0.1 nm |
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Surface topography repeatability |
0.08 nm*5 |
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Repeatability of RMS |
0.008 nm*5 |
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Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
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Accuracy |
±0.6%*5 |
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Optical observation |
Number of pixels |
5.6 million |
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Revolver |
6-hole electric revolver |
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Ring illumination lens |
2.5×, 5×, 10× |
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Optical zoom |
1 to 8× |
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XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
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Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
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Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
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Power consumption |
150 VA |
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Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
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Relative humidity |
20 to 80% RH (No condensation) |
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Weight |
Approx. 13 kg |
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*1 When using a 23-inch full-screen display. | ||||
All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.
If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.
In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.
PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.
Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.
PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

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