


Specifications
Model |
IM-8005 |
|||
Type |
Head |
|||
Image sensor |
1" 20-megapixel monochrome CMOS |
|||
Display |
12.1" LCD monitor (WXGA: 1280 × 800) |
|||
Receiver lens |
Double telecentric lens |
|||
Image measurement |
Field of view |
Wide-field measurement mode |
ø100 mm ø3.94" |
|
High-precision measurement mode |
25 × 25 mm 0.98" × 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Wide-field measurement mode |
Without stage movement |
±1 μm |
|
With stage movement |
— |
|||
High-precision measurement mode |
Without stage movement |
±0.5 μm |
||
With stage movement |
— |
|||
Measurement accuracy (±2σ) |
Wide-field measurement mode |
Without binding |
±3.9 μm *1 |
|
With binding |
— |
|||
High-precision measurement mode |
Without binding |
±2 μm *2 |
||
With binding |
— |
|||
Outer diameter measurement |
Measurement accuracy |
Wide-field measurement mode |
±(2.8 + 0.02 D) μm *3 |
|
High-precision measurement mode |
±(1.4 + 0.04 D) μm *4 |
|||
Light probe measurement |
Measurable area (XY) |
— |
||
Maximum measurement depth | ||||
Light probe diameter | ||||
Measuring force | ||||
Repeatability | ||||
Measurement accuracy | ||||
External remote input |
Non-voltage input (with and without contact) |
|||
External output |
OK/NG/FAIL/MEAS. |
PhotoMos output |
||
Interface |
LAN |
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
||
USB 3.1 |
4 ports (rear: 4) |
|||
USB 2.0 series A |
4 ports (front: 2, rear: 2) |
|||
Monitor output |
DVI-D |
|||
Record |
Hard disk drive |
500 GB |
||
Illumination system |
Transparent |
Telecentric transparent illumination |
||
Ring |
Four division ring illumination |
|||
XY stage |
Moving range |
— |
||
Withstand load |
5 kg |
|||
Z stage |
Moving range |
75 mm 2.95" (electric) |
||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
430 VA or lower |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Overvoltage category |
II |
|||
Pollution degree |
2 |
|||
Weight |
Approx. 24 kg |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position. | ||||


Specifications
Model |
IM-XC100L |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
ø100 ø3.94" |
|
High-precision mode [mm inch] |
25 0.98" × 25 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
1 µm |
|
High-precision mode |
0.5 μm |
|||
Measurement accuracy |
Wide-field mode |
3.5 µm*1 |
||
High-precision mode |
1.8 µm*2 |
|||
Laser height |
Reference distance |
70 mm 2.76" |
||
Repeatability |
σ ≦ 0.6 µm |
|||
Spot diameter |
ø50 µm |
|||
Linearity |
±2 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
— |
||
Measuring force | ||||
AF height |
Repeatability |
|||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED coaxial illumination (optional) | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
12 kg 26.46 lb |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||



Specifications
Model |
IM-8030T |
|||
Type |
Head |
|||
Image sensor |
1" 20-megapixel monochrome CMOS |
|||
Display |
12.1" LCD monitor (WXGA: 1280 × 800) |
|||
Receiver lens |
Double telecentric lens |
|||
Image measurement |
Field of view |
Wide-field measurement mode |
300 × 200 mm 11.81" × 7.87" (4× R50 R1.97") |
|
High-precision measurement mode |
225 × 125 mm 8.86" × 4.92" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Wide-field measurement mode |
Without stage movement |
±1 μm |
|
With stage movement |
±2 μm |
|||
High-precision measurement mode |
Without stage movement |
±0.5 μm |
||
With stage movement |
±1.5 μm |
|||
Measurement accuracy (±2σ) |
Wide-field measurement mode |
Without binding |
±3.9 μm *1 |
|
With binding |
±(7 + 0.02 L) μm *2 |
|||
High-precision measurement mode |
Without binding |
±2 μm *3 |
||
With binding |
±(4 + 0.02 L) μm *4 |
|||
Outer diameter measurement |
Measurement accuracy |
Wide-field measurement mode |
±(2.8 + 0.02 D) μm *5 |
|
High-precision measurement mode |
±(1.4 + 0.04 D) μm *6 |
|||
Light probe measurement |
Measurable area (XY) |
190 × 90 mm 7.48" × 3.54" |
||
Maximum measurement depth |
30 mm 1.18" |
|||
Light probe diameter |
ø3 mm ø0.12" |
|||
Measuring force |
0.015 N |
|||
Repeatability |
±2 μm *7 |
|||
Measurement accuracy |
±(8 + 0.02 L) μm *8 |
|||
Height Measurement Unit |
Measurement range |
0 to 75 mm 0 to 2.95" |
||
Measuring force |
0.3 N |
|||
Measurement accuracy (XY) |
±0.2 mm 0.0079" *9 |
|||
Minimum display unit |
1 μm |
|||
Measurable area (XY) |
Wide-field measurement mode |
145 × 95 mm 5.71" × 3.74" |
||
High-precision measurement mode |
107.5 × 95 mm 4.23" × 3.74" |
|||
Repeatability |
±2 μm *10 |
|||
Measurement accuracy |
±7.5 μm *11 |
|||
External remote input |
Non-voltage input (with and without contact) |
|||
External output |
OK/NG/FAIL/MEAS. |
PhotoMos output |
||
Interface |
LAN |
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
||
USB 3.1 |
4 ports (rear: 4) |
|||
USB 2.0 series A |
4 ports (front: 2, rear: 2) |
|||
Monitor output |
DVI-D |
|||
Record |
Hard disk drive |
500 GB |
||
Illumination system |
Transparent |
Telecentric transparent illumination |
||
Ring |
Four division, multi-angle illumination (electric), Slit ring (directivity) illumination (electric) |
|||
XY stage |
Moving range |
200 × 100 mm 7.87" × 3.94" (electric) |
||
Withstand load |
7.5 kg |
|||
Z stage |
Moving range |
75 mm 2.95" (electric) |
||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
430 VA or lower |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Overvoltage category |
II |
|||
Pollution degree |
2 |
|||
Weight |
Approx. 35 kg |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23 ±1°C +73.4°F ±1.8°F at the focal point position. | ||||





Specifications
Model |
IM-8010 |
|||
Type |
Head |
|||
Image sensor |
1" 20 megapixel monochrome CMOS |
|||
Display |
12.1" LCD monitor (WXGA: 1280 x 800) |
|||
Receiver lens |
Double telecentric lens |
|||
Image measurement |
Field of view |
Wide-field measurement mode |
200 mm × 200 mm (quadangle R50) |
|
High-precision measurement mode |
125 mm×125 mm |
|||
Minimum display unit |
0.1 µm |
|||
Repeatability |
Wide-field measurement mode |
Without stage movement |
±1 µm |
|
With stage movement |
±2 µm |
|||
High-precision measurement mode |
Without stage movement |
±0.5 µm |
||
With stage movement |
±1.5 µm |
|||
Measurement accuracy (±2σ) |
Wide-field measurement mode |
Without binding |
±3.9 µm*1 |
|
With binding |
±(7+0.02L) µm*2 |
|||
High-precision measurement mode |
Without binding |
±2µm*3 |
||
With binding |
±(4+0.02L) µm*4 |
|||
Outer diameter measurement |
Measurement accuracy |
Wide-field measurement mode |
±(2.8+0.02D) µm*5 |
|
High-precision measurement mode |
±(1.4+0.04D) µm*6 |
|||
External remote input |
Non-voltage input (contact/solid-state) |
|||
External output |
OK/NG/FAIL/MEAS. |
PhotoMOS output |
||
External illumination control |
Intensity control |
PWM control 100 kHz |
||
Output voltage |
DC12V |
|||
Output current |
1.6 A (max.) |
|||
Interface |
LAN |
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
||
USB 3.1 |
4 ports (Rear: 4) |
|||
USB 2.0 series A |
4 ports (Front: 2, Rear: 2) |
|||
Monitor output |
DVI-D |
|||
Record |
Hard disk drive |
500 GB |
||
Illumination system |
Transparent |
Telecentric transmissive illumination |
||
Ring |
Four division multi-angle illumination (motorized) |
|||
XY stage |
Moving range |
100 mm × 100 mm (motorized) |
||
Withstand load |
5 kg |
|||
Z stage |
Moving range |
75 mm (motorized) |
||
Power supply |
Power voltage |
100 to 240 V ±10% 50/60Hz |
||
Power consumption |
430 VA max. |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*7 |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Overvoltage category |
II |
|||
Pollution degree |
2 |
|||
Weight |
Approx. 30 kg |
|||
*1 In the range of ø80 mm and the operating ambient temperature range of +23 ± 1°C at the focused focal point position | ||||



Specifications
Model |
IM-X1330 |
|||
Type |
Stage unit |
|||
Head used |
IM Head, LM Head |
|||
Measurement range (X × Y) |
Image measurement |
Wide-field mode [mm inch] |
IM Head: 300 × 300 11.81" × 11.81", LM Head: 225 × 225 8.86" × 8.86" |
|
High-precision mode [mm inch] |
IM Head: 225 × 225 8.86" × 8.86", LM Head: 206 × 206 8.11" × 8.11" |
|||
AF height [mm inch] |
IM Head: —, LM Head: 200 × 200 7.87" × 7.87" |
|||
Laser height [mm inch] |
IM Head: 168 × 168 6.61" × 6.61", LM Head: 196 × 139 7.72" × 5.47" |
|||
Touch probe [mm inch] |
IM Head: 146 × 196 5.75" × 7.72", LM Head: 150 × 196 5.91" × 7.72" |
|||
Z stage |
Moving range [mm inch] |
150 5.91" |
||
Measurement accuracy |
X/Y axis (EUX, MPE EUY, MPE) |
1.8 + 0.02 L µm*1 *2 |
||
X/Y plane (EUXY, MPE) |
2.8 + 0.02 L µm*1 *2 |
|||
Z axis (EUZ, MPE) |
3.8 + 0.04 L µm*3 *4 |
|||
Load capacity |
15 kg*5 33.07 lb |
|||
Ratings |
Power voltage |
24 VDC |
||
Current consumption |
7.5 A |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*6 +50°F to 95°F |
||
Weight |
32 kg 70.55 lb |
|||
*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. | ||||



Specifications
Model |
IM-X1540 |
|||
Type |
Stage unit |
|||
Head used |
IM Head, LM Head |
|||
Measurement range (X × Y) |
Image measurement |
Wide-field mode [mm inch] |
IM Head: 500 × 400 19.69" × 15.75", LM Head: 425 × 325 16.73" × 12.80" |
|
High-precision mode [mm inch] |
IM Head: 425 × 325 16.73" × 12.80", LM Head: 406 × 306 15.98" × 12.05" |
|||
AF height [mm inch] |
IM Head: —, LM Head: 400 × 300 15.75" × 11.81" |
|||
Laser height [mm inch] |
IM Head: 368 × 268 14.49" × 10.55", LM Head: 396 × 239 15.59" × 9.41" |
|||
Touch probe [mm inch] |
IM Head: 346 × 296 13.62" × 11.65", LM Head: 350 × 296 13.78" × 11.65" |
|||
Z stage |
Moving range [mm inch] |
200 7.87" |
||
Measurement accuracy |
X/Y axis (EUX, MPE EUY, MPE) |
1.8 + 0.02 L µm*1 *2 |
||
X/Y plane (EUXY, MPE) |
2.8 + 0.02 L µm*1 *2 |
|||
Z axis (EUZ, MPE) |
3.8 + 0.04 L µm*3 *4 |
|||
Load capacity |
15 kg*5 33.07 lb |
|||
Ratings |
Power voltage |
24 VDC |
||
Current consumption |
7.5 A |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*6 +50°F to 95°F |
||
Weight |
70 kg 154.32 lb |
|||
*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. | ||||





