
Specifications
Model |
VJ-H500CX |
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Image sensor |
Color CMOS, square lattice |
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Unit cell size |
3.45 µm × 3.45 µm |
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Image size |
Equivalent to 2/3" |
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Valid pixel count |
5 megapixel mode: 2432 (H) × 2040 (V) 2 megapixel mode: 1600 (H) × 1200 (V) |
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Transfer time |
5 megapixel mode: 29.2 ms |
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Pixel transfer frequency |
195 MHz |
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Transfer system |
Digital serial transfer |
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Electronic shutter |
Settable from 0.017 msec to 100 msec |
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Lens mount |
C-mount |
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Environmental resistance |
Ambient temperature |
0 to 40°C 32 to 104°F |
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Relative humidity |
85% RH or less |
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Weight |
Approx. 280 g (not including lens) |
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Specifications
Model |
VJ-H500MX |
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Image sensor |
Monochrome CMOS, square lattice |
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Unit cell size |
3.45 µm × 3.45 µm |
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Image size |
Equivalent to 2/3" |
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Valid pixel count |
5 megapixel mode: 2432 (H) × 2040 (V) 2 megapixel mode: 1600 (H) × 1200 (V) |
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Transfer time |
5 megapixel mode: 27.7 ms |
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Pixel transfer frequency |
195 MHz |
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Transfer system |
Digital serial transfer |
|||
Electronic shutter |
Settable from 0.017 msec to 100 msec |
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Lens mount |
C-mount |
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Environmental resistance |
Ambient temperature |
0 to 40°C 32 to 104°F |
||
Relative humidity |
85% RH or less |
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Weight |
Approx. 280 g (not including lens) |
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PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.


PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.



Specifications
Model |
VK-D1 |
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XY stage configuration |
Motorized: Operating range |
100 mm x 100 mm 3.94" x 3.94" |
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Weight |
Approx. 18.5 kg |
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Specifications
Model |
VK-D3 |
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XY stage configuration |
Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
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Weight |
Approx. 19.5 kg |
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Specifications
Model |
VK-S1 |
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XY stage configuration |
Manual: Operating range |
70 mm x 70 mm 2.76" x 2.76" |
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Weight |
Approx. 16.0 kg |
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Specifications
Model |
VK-S3 |
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XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
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Weight |
Approx. 17 kg |
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Specifications
Model |
VK-X3000 |
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Type |
Controller |
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Total magnification |
42 to 28800×*1 |
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Field of view |
11 to 7398 μm |
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Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
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Laser wavelength |
VK-X3100: Semiconductor laser, 404 nm |
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Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
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Max. laser output |
1.0 mW |
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Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
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Laser light-receiving element |
16-bit photomultiplier |
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White light source |
White LED |
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White-light-receiving element |
High-definition color CMOS |
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Laser confocal |
Height display resolution |
VK-X3100: 0.1 nm |
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Height repeatability σ |
VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
VK-X3100: 0.1 nm |
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Width repeatability 3σ |
VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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Focus variation |
Height display resolution |
VK-X3100: 0.1 nm |
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Height repeatability σ |
VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm |
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Height accuracy |
0.2+L/ 100 μm or less*4 |
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Width display resolution |
VK-X3100: 0.1 nm |
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Width repeatability 3σ |
VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm |
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Width accuracy |
Measured value ±2% or less*4 |
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White light interferometry |
Height display resolution |
0.01 nm |
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Width display resolution |
0.1 nm |
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Surface topography repeatability |
0.08 nm*5 |
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Repeatability of RMS |
0.008 nm*5 |
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Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
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Accuracy |
±0.6%*5 |
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Optical observation |
Number of pixels |
5.6 million |
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Revolver |
6-hole electric revolver |
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Ring illumination lens |
2.5×, 5×, 10× |
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Optical zoom |
1 to 8× |
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XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
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Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
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Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
||
Power consumption |
150 VA |
|||
Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
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Relative humidity |
20 to 80% RH (No condensation) |
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Weight |
Approx. 3 kg |
|||
*1 When using a 23-inch full-screen display. | ||||

Specifications
Model |
VK-X3050 |
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Type |
Measurement head |
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Total magnification |
42 to 28800×*1 |
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Field of view |
11 to 7398 μm |
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Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
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Laser wavelength |
Semiconductor laser, 661 nm |
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Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
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Max. laser output |
1.0 mW |
|||
Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
|||
Laser light-receiving element |
16-bit photomultiplier |
|||
White light source |
White LED |
|||
White-light-receiving element |
High-definition color CMOS |
|||
Laser confocal |
Height display resolution |
1 nm |
||
Height repeatability σ |
10×: 100 nm, 20×: 40 nm, 50×: 20 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
1 nm |
|||
Width repeatability 3σ |
10×: 400 nm, 20×: 100 nm, 50×: 50 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
Focus variation |
Height display resolution |
1 nm |
||
Height repeatability σ |
5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
1 nm |
|||
Width repeatability 3σ |
5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
White light interferometry |
Height display resolution |
0.01 nm |
||
Width display resolution |
0.1 nm |
|||
Surface topography repeatability |
0.08 nm*5 |
|||
Repeatability of RMS |
0.008 nm*5 |
|||
Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
||
Accuracy |
±0.6%*5 |
|||
Optical observation |
Number of pixels |
5.6 million |
||
Revolver |
6-hole electric revolver |
|||
Ring illumination lens |
2.5×, 5×, 10× |
|||
Optical zoom |
1 to 8× |
|||
XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
||
Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
|||
Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
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Power consumption |
150 VA |
|||
Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
||
Relative humidity |
20 to 80% RH (No condensation) |
|||
Weight |
Approx. 13 kg |
|||
*1 When using a 23-inch full-screen display. | ||||

Specifications
Model |
VK-X3100 |
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Type |
Measurement head |
|||
Total magnification |
42 to 28800×*1 |
|||
Field of view |
11 to 7398 μm |
|||
Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
|||
Laser wavelength |
Semiconductor laser, 404 nm |
|||
Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
|||
Max. laser output |
1.0 mW |
|||
Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
|||
Laser light-receiving element |
16-bit photomultiplier |
|||
White light source |
White LED |
|||
White-light-receiving element |
High-definition color CMOS |
|||
Laser confocal |
Height display resolution |
0.1 nm |
||
Height repeatability σ |
10×: 100 nm, 20×: 40 nm, 50×: 12 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
0.1 nm |
|||
Width repeatability 3σ |
10×: 200 nm, 20×: 100 nm, 50×: 40 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
Focus variation |
Height display resolution |
0.1 nm |
||
Height repeatability σ |
5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
0.1 nm |
|||
Width repeatability 3σ |
5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
White light interferometry |
Height display resolution |
0.01 nm |
||
Width display resolution |
0.1 nm |
|||
Surface topography repeatability |
0.08 nm*5 |
|||
Repeatability of RMS |
0.008 nm*5 |
|||
Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
||
Accuracy |
±0.6%*5 |
|||
Optical observation |
Number of pixels |
5.6 million |
||
Revolver |
6-hole electric revolver |
|||
Ring illumination lens |
2.5×, 5×, 10× |
|||
Optical zoom |
1 to 8× |
|||
XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
||
Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
|||
Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
||
Power consumption |
150 VA |
|||
Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
||
Relative humidity |
20 to 80% RH (No condensation) |
|||
Weight |
Approx. 13 kg |
|||
*1 When using a 23-inch full-screen display. | ||||

Specifications
Model |
VL-800 |
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Type |
Controller |
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Stage |
VL-850, VL-830 |
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Measurement unit |
VL-870 |
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Optical transmitter system |
High-luminance dual projector module |
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Optical receiver system |
Wide dynamic range low/high magnification offset dual optical module |
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Light sources |
Measurement light source |
Blue LED |
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Color texture light source |
LEDs in 3 colors (red, green, blue) |
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Captured data format |
Full-color texture 3D mesh data |
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Repeatability (σ) |
2 μm *1 |
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Measurement accuracy |
±10 μm *2 |
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Measurement resolution |
9 million measurement points |
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Measurement modes |
Low magnification |
High-speed/Standard/High-definition (wide field) |
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High magnification |
Standard/High-definition (High resolution) |
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Measurement range |
Low magnification |
ø300 × H200 mm ø11.81" × H7.87" (wide field) |
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High magnification |
ø70 × H50 mm ø2.76" × H1.97" (High resolution) |
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Extended measurement |
Automatic rotation combined measurements |
✓ |
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Automatic XY combined measurements |
VL-850: ✓ |
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Automatic XY combined measurement range |
Low magnification (2 × 2 composition) |
VL-850: ø500 × H200 mm ø19.69" × H7.87" |
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Low magnification (3 × 1 composition) |
VL-850: W580 × D300 × H200 mm W22.83" × D11.81" × H7.87" *3 |
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High magnification (2 × 2 composition) |
VL-850: ø110 × H50 mm ø4.33" × H1.97" |
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High magnification (3 × 1 composition) |
VL-850: W150 × D70 × H50 mm W5.91" × D2.76" × H1.97" *3 |
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Stage |
Stage configuration |
VL-850: Motorized XYθ stage mechanism |
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Stage top panel size |
ø500 mm ø19.69" |
|||
Stage rotation |
360° (infinite rotation) |
|||
Stage movement range |
VL-850: ø200 mm ø7.87" |
|||
Tilt mechanism |
Up to 45° |
|||
Load capacity |
50 kg 110.23 lb |
|||
Control PC |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
Controller/Measurement unit: 320 VA |
|||
Environmental resistance |
Ambient temperature range |
+15 to +30°C +59 to +86°F |
||
Ambient humidity range |
20 to 80% RH (no condensation) |
|||
Weight |
Controller: 3.7 kg 8.16 lb |
|||
*1 Value when measurement is performed using the default measurement mode specified by KEYENCE and using the default standard gauge specified by KEYENCE and at an operating ambient temperature of 23°C ±1°C 73.4°F ±1.8°F | ||||
