Optical Metrology Systems

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Keyence OP-89057 Keyence

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Keyence IM-XTPC1 Keyence

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Keyence IM-XSG3 Keyence

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Keyence IM-XSG2 Keyence

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Keyence IM-XRU Keyence

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Keyence IM-XB1 Keyence

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Keyence IM-XH1E Keyence

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Keyence IM-XH1C Keyence

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Keyence IM-XDXW Keyence

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Keyence LM-XC100TL2 Keyence

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Specifications

Model				LM-XC100TL2
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		25 0.98" × 25 0.98"
		High-precision mode [mm inch]		6 0.24" × 6 0.24"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 µm^*1
			High-precision mode	0.7 µm^*2
Laser height	Reference distance			15 mm 0.59"
	Repeatability			σ ≦ 0.45 µm
	Spot diameter			ø10 µm
	Linearity			±0.35 μm^*3
	Laser class			Class 1
Touch probe	Repeatability			±1 μm
	Measuring force			0.015 N^*4
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				11 kg 24.25 lb
^1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 5 × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^3 Value measured with KEYENCE reference workpiece, laser stand-alone performance. ^4 Reference value

Keyence LM-XC100TL Keyence

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Specifications

Model				LM-XC100TL
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		25 0.98" × 25 0.98"
		High-precision mode [mm inch]		6 0.24" × 6 0.24"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 µm^*1
			High-precision mode	0.7 µm^*2
Laser height	Reference distance			70 mm 2.76"
	Repeatability			σ ≦ 0.6 µm
	Spot diameter			ø50 µm
	Linearity			±2 μm^*3
	Laser class			Class 1
Touch probe	Repeatability			±1 μm
	Measuring force			0.015 N^*4
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				11 kg 24.25 lb
^1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 5 × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^3 Value measured with KEYENCE reference workpiece, laser stand-alone performance. ^4 Reference value

Keyence LM-XC100T Keyence

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Specifications

Model				LM-XC100T
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		25 0.98" × 25 0.98"
		High-precision mode [mm inch]		6 0.24" × 6 0.24"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 µm^*1
			High-precision mode	0.7 µm^*2
Laser height	Reference distance			—
	Repeatability
	Spot diameter
	Linearity
	Laser class
Touch probe	Repeatability			±1 μm
	Measuring force			0.015 N^*3
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				10 kg 22.05 lb
^1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 5 × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^*3 Reference value

Keyence LM-XC100L Keyence

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Specifications

Model				LM-XC100L
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		25 0.98" × 25 0.98"
		High-precision mode [mm inch]		6 0.24" × 6 0.24"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 µm^*1
			High-precision mode	0.7 µm^*2
Laser height	Reference distance			70 mm 2.76"
	Repeatability			σ ≦ 0.6 µm
	Spot diameter			ø50 µm
	Linearity			±2 μm^*3
	Laser class			Class 1
Touch probe	Repeatability			—
	Measuring force
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				11 kg 24.25 lb
^1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 5 × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^*3 Value measured with KEYENCE reference workpiece, laser stand-alone performance.

Keyence LM-XC100 Keyence

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Specifications

Model				LM-XC100
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		25 0.98" × 25 0.98"
		High-precision mode [mm inch]		6 0.24" × 6 0.24"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	0.5 μm
			High-precision mode	0.1 μm
	Measurement accuracy		Wide-field mode	1.8 µm^*1
			High-precision mode	0.7 µm^*2
Laser height	Reference distance			—
	Repeatability
	Spot diameter
	Linearity
	Laser class
Touch probe	Repeatability
	Measuring force
AF height	Repeatability			±2 μm
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED, telecentric coaxial illumination
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				9 kg 19.84 lb
^1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 5 × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position.

Keyence IM-XC100TL Keyence

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Specifications

Model				IM-XC100TL
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		ø100 ø3.94"
		High-precision mode [mm inch]		25 0.98" × 25 0.98"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	1 µm
			High-precision mode	0.5 μm
	Measurement accuracy		Wide-field mode	3.5 µm^*1
			High-precision mode	1.8 µm^*2
Laser height	Reference distance			70 mm 2.76"
	Repeatability			σ ≦ 0.6 µm
	Spot diameter			ø50 µm
	Linearity			±2 μm^*3
	Laser class			Class 1
Touch probe	Repeatability			±1 μm
	Measuring force			0.015 N^*4
AF height	Repeatability			—
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED coaxial illumination (optional)
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				12 kg 26.46 lb
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^3 Value measured with KEYENCE reference workpiece, laser stand-alone performance. ^4 Reference value

Keyence IM-XC100T Keyence

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Specifications

Model				IM-XC100T
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		ø100 ø3.94"
		High-precision mode [mm inch]		25 0.98" × 25 0.98"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	1 µm
			High-precision mode	0.5 μm
	Measurement accuracy		Wide-field mode	3.5 µm^*1
			High-precision mode	1.8 µm^*2
Laser height	Reference distance			—
	Repeatability
	Spot diameter
	Linearity
	Laser class
Touch probe	Repeatability			±1 μm
	Measuring force			0.015 N^*3
AF height	Repeatability			—
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED coaxial illumination (optional)
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				11 kg 24.25 lb
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^*3 Reference value

Keyence IM-XC100L Keyence

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Specifications

Model				IM-XC100L
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		ø100 ø3.94"
		High-precision mode [mm inch]		25 0.98" × 25 0.98"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	1 µm
			High-precision mode	0.5 μm
	Measurement accuracy		Wide-field mode	3.5 µm^*1
			High-precision mode	1.8 µm^*2
Laser height	Reference distance			70 mm 2.76"
	Repeatability			σ ≦ 0.6 µm
	Spot diameter			ø50 µm
	Linearity			±2 μm^*3
	Laser class			Class 1
Touch probe	Repeatability			—
	Measuring force
AF height	Repeatability
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED coaxial illumination (optional)
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				12 kg 26.46 lb
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^*3 Value measured with KEYENCE reference workpiece, laser stand-alone performance.

Keyence IM-XC100 Keyence

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Specifications

Model				IM-XC100
Type				Head
Image measurement	Field of view	Wide-field mode [mm inch]		ø100 ø3.94"
		High-precision mode [mm inch]		25 0.98" × 25 0.98"
	Minimum display unit			0.1 μm
	Repeatability	Within field of view (2σ)	Wide-field mode	1 µm
			High-precision mode	0.5 μm
	Measurement accuracy		Wide-field mode	3.5 µm^*1
			High-precision mode	1.8 µm^*2
Laser height	Reference distance			—
	Repeatability
	Spot diameter
	Linearity
	Laser class
Touch probe	Repeatability
	Measuring force
AF height	Repeatability
Illumination system	Transparent			Green LED, telecentric transparent illumination
	Coaxial			Color LED, white LED, four-division multi-angle illumination (electric)
				Green LED, slit ring (directivity) lateral illumination (electric)
				White LED coaxial illumination (optional)
Environmental resistance	Ambient temperature			+10 to 35°C +50°F to 95°F
Weight				10 kg 22.05 lb
^1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. ^2 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position.

Keyence IM-X1540 Keyence

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Specifications

Model			IM-X1540
Type			Stage unit
Head used			IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm inch]	IM Head: 500 × 400 19.69" × 15.75", LM Head: 425 × 325 16.73" × 12.80"
		High-precision mode [mm inch]	IM Head: 425 × 325 16.73" × 12.80", LM Head: 406 × 306 15.98" × 12.05"
	AF height [mm inch]		IM Head: —, LM Head: 400 × 300 15.75" × 11.81"
	Laser height [mm inch]		IM Head: 368 × 268 14.49" × 10.55", LM Head: 396 × 239 15.59" × 9.41"
	Touch probe [mm inch]		IM Head: 346 × 296 13.62" × 11.65", LM Head: 350 × 296 13.78" × 11.65"
Z stage	Moving range [mm inch]		200 7.87"
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)		1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)		2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)		3.8 + 0.04 L µm^3 ^4
Load capacity			15 kg^*5 33.07 lb
Ratings	Power voltage		24 VDC
	Current consumption		7.5 A
Environmental resistance	Ambient temperature		+10 to 35°C^*6 +50°F to 95°F
Weight			70 kg 154.32 lb
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm 2.44" or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm 2.44". ^5 5 kg 11.02lb at XY stage travel speed of 120 mm/s 4.72"/s. ^6 +15 to 35°C +59°F to 95°F at XY stage travel speed of 120 mm/s 4.72"/s.

Keyence IM-X1330 Keyence

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Specifications

Model			IM-X1330
Type			Stage unit
Head used			IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm inch]	IM Head: 300 × 300 11.81" × 11.81", LM Head: 225 × 225 8.86" × 8.86"
		High-precision mode [mm inch]	IM Head: 225 × 225 8.86" × 8.86", LM Head: 206 × 206 8.11" × 8.11"
	AF height [mm inch]		IM Head: —, LM Head: 200 × 200 7.87" × 7.87"
	Laser height [mm inch]		IM Head: 168 × 168 6.61" × 6.61", LM Head: 196 × 139 7.72" × 5.47"
	Touch probe [mm inch]		IM Head: 146 × 196 5.75" × 7.72", LM Head: 150 × 196 5.91" × 7.72"
Z stage	Moving range [mm inch]		150 5.91"
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)		1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)		2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)		3.8 + 0.04 L µm^3 ^4
Load capacity			15 kg^*5 33.07 lb
Ratings	Power voltage		24 VDC
	Current consumption		7.5 A
Environmental resistance	Ambient temperature		+10 to 35°C^*6 +50°F to 95°F
Weight			32 kg 70.55 lb
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm 2.44" or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm 2.44". ^5 5 kg 11.02lb at XY stage travel speed of 120 mm/s 4.72"/s. ^6 +15 to 35°C +59°F to 95°F at XY stage travel speed of 120 mm/s 4.72"/s.

Keyence IM-X1220 Keyence

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Specifications

Model			IM-X1220
Type			Stage unit
Head used			IM Head, LM Head
Measurement range (X × Y)	Image measurement	Wide-field mode [mm inch]	IM Head: 200 × 200 7.87" × 7.87", LM Head: 125 × 125 4.92" × 4.92"
		High-precision mode [mm inch]	IM Head: 125 × 125 4.92" × 4.92", LM Head: 106 × 106 4.17" × 4.17"
	AF height [mm inch]		IM Head: —, LM Head: 100 × 100 3.94" × 3.94"
	Laser height [mm inch]		—
	Touch probe [mm inch]
Z stage	Moving range [mm inch]		150 5.91"
Measurement accuracy	X/Y axis (EUX, MPE EUY, MPE)		1.8 + 0.02 L µm^1 ^2
	X/Y plane (EUXY, MPE)		2.8 + 0.02 L µm^1 ^2
	Z axis (EUZ, MPE)		IM Head: —, LM Head: 3.8 + 0.04 L µm^3 ^4
Load capacity			15 kg^*5 33.07 lb
Ratings	Power voltage		24 VDC
	Current consumption		7.5 A
Environmental resistance	Ambient temperature		+10 to 35°C^*6 +50°F to 95°F
Weight			29 kg 63.93 lb
^1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. ^2 In accordance with ISO10360-2 when measuring with touch probe; X/Y axis 2.8 + 0.02 L µm; XY plane 3.8 + 0.02 L µm. ^3 In accordance with ISO10360-7; in accordance with ISO10360-2 when measuring with touch probe; L is the amount of Z stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F; with KEYENCE reference workpiece; with maximum measurement target height setting of 62 mm 2.44" or less. ^4 At 3.8 + 0.08 L µm if the maximum measurement target height exceeds 62 mm 2.44". ^5 5 kg 11.02lb at XY stage travel speed of 120 mm/s 4.72"/s. ^6 +15 to 35°C +59°F to 95°F at XY stage travel speed of 120 mm/s 4.72"/s.