Digital Microscopes

Model

VHX-7100

Image element

1/1.7-inch, 12.22-megapixel CMOS image sensor;
total pixels: 4168 (H) × 3062 (V); virtual pixels: 4024 (H) × 3036 (V)

Scanning system

Progressive

Frame rate

30 F/S (max.)

Resolution

Fast

2048 (H) × 1536 (V)

Standard

2880 (H) × 2160 (V)

High-resolution

2880 (H) × 2160 (V) (4K Mode OFF), 4000 (H) × 3000 (V) (4K Mode ON)

High accuracy

12,000 (H) × 9000 (V)^*1

High dynamic range

16-bit intensity range through RGB data from each pixel

Gain

Manual, Preset

Electronic shutter

Auto, Manual, 1/30, 1/60, 1/120, 1/250, 1/500, 1/1000, 1/2000, 1/5000, 1/9000, 1/19,000

Supercharge shutter

Can be set in 0.01 s increments from 0.03 to 4 s

White balance

Push-set, Manual, Preset (2700K, 3200K, 5600K, 9000K)

Back-focus adjustment

Not required

Built-in light source

Type

High-intensity LED

Service life

40 thousand hours (reference value)

Model

VK-X3000

Type

Controller

Total magnification

42 to 28800×^*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

VK-X3100: Semiconductor laser, 404 nm
VK-X3050: Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz^*2

Max. laser output

1.0 mW

Laser class

Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10^*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm
VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less^*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm
VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less^*4

Focus variation

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less^*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less^*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm^*5

Repeatability of RMS

0.008 nm^*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm^*5

Accuracy

±0.6%^*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 3 kg

Model

VH-B40

Type

Borescope lens

Borescope lens zoom attachment

VH-BA

Outer diameter

When the borescope lens alone/With the Guard tube installed

ø4.0 mm ø0.16"^*1

When the Lateral view tube is installed

ø4.4 mm0.173" ^*2

View direction

When the borescope lens alone/With the Guard tube installed

0° (Direct view)

When the Lateral view tube is installed

90° (Lateral view)

Effective length

141.5 mm 5.57"

Maximum observation magnification

140x^*3

View angle

30°

Minimum view range

2 mm 0.08"^*4

Working distance

5 mm 0.20" or more

Environmental resistance

Ambient temperature

0 to +40 °C 32 to 104 °F

Model

VK-D1

XY stage configuration

Motorized: Operating range

100 mm x 100 mm 3.94" x 3.94"

Weight

Approx. 18.5 kg

Model

VHX-S650E

XYθ stage

XY stage: Motorized/Manual

Motorized

XY-stage movement range

±20 mm ±0.79"

θ rotation angle

±90°

XYθ stage size

Top surface: 171 × 168 mm 6.73" × 6.61" (Center disc: ø100 ø3.94")

Transmitted lighting

Provided

Z stage

Z stage: Motorized/Manual

Motorized

Z-motorized stage motor

5-phase stepping motor

Z-motorized stage travel speed

17 mm 0.67"/sec (max)

Z-stage movement range

49 mm 1.93"

Load capacity

5 kg

XYθ stage

XY-motorized stage motor

2-phase stepping motor

XY-motorized stage resolution

1 µm (typ.)

XY-motorized stage movement speed

10 mm 0.39"/sec (max.)

Z stage

Z-motorized stage resolution

0.1 µm (typ.)

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

60 VA

Environmental resistance

Ambient temperature

+5 to +40 °C 41 to 104 °F

Relative humidity

35 to 80 % RH (No condensation)

Weight

Approx. 18 kg

Model

VH-Z100T

Magnification

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x^*1

Field-of-view

Horizontal

100 x: 3.05 mm 0.12"
200 x: 1.53 mm 0.06"
300 x: 1.02 mm 0.04"
500 x: 0.61 mm 0.02"
700 x: 0.44 mm 0.02"
1000 x: 0.30 mm 0.01"

Vertical

100 x: 2.28 mm 0.09"
200 x: 1.14 mm 0.04"
300 x: 0.76 mm 0.03"
500 x: 0.46 mm 0.02"
700 x: 0.33 mm 0.01"
1000 x: 0.23 mm 0.01"

Diagonal

100 x: 3.81 mm 0.15"
200 x: 1.90 mm 0.07"
300 x: 1.27 mm 0.05"
500 x: 0.76 mm 0.03"
700 x: 0.54 mm 0.02"
1000 x: 0.38 mm 0.01"

Working distance

100 x, 200 x, 300 x, 500 x, 700 x, 1000 x:25 mm 0.98" (20 mm 0.79"^*2)

Model

VK-X3050

Type

Measurement head

Total magnification

42 to 28800×^*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz^*2

Max. laser output

1.0 mW

Laser class

Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10^*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

1 nm

Height repeatability σ

10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less^*4

Width display resolution

1 nm

Width repeatability 3σ

10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less^*4

Focus variation

Height display resolution

1 nm

Height repeatability σ

5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less^*4

Width display resolution

1 nm

Width repeatability 3σ

5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less^*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm^*5

Repeatability of RMS

0.008 nm^*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm^*5

Accuracy

±0.6%^*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 13 kg

Model

VHX-S700F

Z stage

Z motorized/manual stage

Motorized

Z motorized stage motor

5-phase stepping motor

Z motorized stage resolution

0.1 µm (typ.)

Z motorized stage movement speed

17 mm 0.67"/sec (max)

Z stage movement amount

49 mm 1.93"

Ratings

Power voltage

12V DC 2.5 A

Power consumption

30 VA

Environmental resistance

Ambient temperature

+5 to 40°C +41 to 104 °F

Relative humidity

20 to 80% RH (no condensation)

Weight

Approx. 3.5 kg

Model

VH-Z20T

Magnification

20 x, 30 x, 50 x, 100 x, 150 x, 200 x^*1

Field-of-view

Horizontal

20 x: 15.24 mm 0.60"
30 x: 10.16 mm 0.40"
50 x: 6.10 mm 0.24"
100 x: 3.05 mm 0.12"
150 x: 2.03 mm 0.08"
200 x: 1.52 mm 0.06"

Vertical

20 x: 11.40 mm 0.45"
30 x: 7.60 mm 0.30"
50 x: 4.56 mm 0.18"
100 x: 2.28 mm 0.09"
150 x: 1.52 mm 0.06"
200 x: 1.14 mm 0.04"

Diagonal

20 x: 19.05 mm 0.75"
30 x: 12.70 mm 0.50"
50 x: 7.62 mm 0.30"
100 x: 3.81 mm 0.15"
150 x: 2.54 mm 0.10"
200 x: 1.91 mm 0.08"

Depth-of-field

20 x: 34 mm 1.34"
30 x: 15.5 mm 0.61"
50 x: 6.0 mm 0.24"
100 x: 1.6 mm 0.06"
150 x: 0.74 mm 0.03"
200 x: 0.44 mm 0.02"^*2

Working distance

20 x, 30 x, 50 x, 100 x, 150 x, 200 x: 25.5 mm 1"