
Specifications
Model |
SI-F1003V |
|||
Separate type |
SI-F1003/SI-FD500 |
|||
Type |
Built-in main controller type |
|||
No. of connectable spectrum units |
2 |
|||
Display |
Minimum display unit |
0.001 µm |
||
Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
|||
Display cycle |
10 times/sec. |
|||
Terminal block |
Laser remote interlock input |
Non-voltage input*1 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*1 |
|||
Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1 |
|||
Alarm output |
NPN open-collector output (N.C.)*1 |
|||
General comparator output |
NPN open-collector output*1 |
|||
Expansion connector |
TIMING2 input |
Non-voltage input*1 |
||
RESET input | ||||
Auto-zero input | ||||
Program switch input |
Non-voltage input x 3 inputs*1 |
|||
Alarm output |
NPN open-collector output (N.C.)*1 |
|||
Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*1 |
||
Strobe output |
NPN open-collector output*1 |
|||
Binary selection output | ||||
Binary selection input |
Non-voltage input*1 |
|||
RS-232C interface |
Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) |
|||
USB interface |
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) |
|||
Ethernet interface |
100Base-TX/10Base-T |
|||
Major functions |
12 Out simultaneous measurement |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*2 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 600 g |
|||
*1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max. | ||||

Specifications
Model |
SI-F10U |
|||
Type |
Long distance type Spectrum unit |
|||
Measurement range |
11.3 to 12.35 mm 0.44" to 0.49" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø40 µm ø0.001575"*3 |
|||
Linearity |
±0.3 µm ±0.000012" *4 |
|||
Resolution |
0.01 µm *5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
- |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F10U3 |
|||
Measurement range |
11.3 to 12.35 mm 0.04" to 0.49" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø40 µm ø0.001575"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 650 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F80 |
|||
Type |
Thickness measurement type Sensor head |
|||
Measurement range |
0.05 to 1.1 mm 0.002" to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
IP64 |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +50 °C 32 to 122 °F |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Material |
SUS |
|||
Material |
Sensor head |
|||
Spectrum unit |
Polycarbonate |
|||
Weight |
Approx. 39 g (including cable) |
|||
*1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range. | ||||

Specifications
Model |
SI-F80R*1 |
|||
Type |
Wafer thickness measurement type Sensor head |
|||
Measurement range |
10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*2 |
|||
Possible detection distance |
80 to 81.1 mm 3.15" to 3.19" |
|||
Light source |
Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
|||
Spot diameter |
ø25 µm ø0.000984"*4 |
|||
Linearity |
±0.1 µm ±0.000004" (when n=3.5)*5 |
|||
Resolution |
0.001 µm *6 |
|||
Sampling cycle |
200 µs |
|||
LED display |
Target near center of measurement range : green lights. Target within measurement range : orange lights. |
|||
Temperature fluctuation |
― |
|||
Environmental resistance |
Enclosure rating |
IP64 |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +50 °C 32 to 122 °F |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Material |
SUS |
|||
Weight |
Approx. 70 g (including cable) |
|||
*1 The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable. | ||||

Specifications
Model |
SI-F80RU |
|||
Type |
Wafer Thickness Measurement Type Spectrum Unit |
|||
Measurement range |
10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*1 |
|||
Possible detection distance |
80 to 81.1 mm 3.15" to 3.19" |
|||
Light source |
Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø25 µm*3 |
|||
Linearity |
±0.1 µm ±0.000004" (when n=3.5)*4 |
|||
Resolution |
0.001 µm *5 |
|||
Sampling cycle |
200 µs |
|||
LED display |
Target near center of measurement range : green lights. Target within measurement range : orange lights. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
- |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1.2 kg |
|||
*1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 µm0.001378" to 0.0433" when the refractive index is 1.) | ||||

Specifications
Model |
SI-F80U |
|||
Type |
Thickness measurement type Spectrum unit |
|||
Measurement range |
0.05 to 1.1 mm 0.002" to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.2 µm ±0.000008" *4 |
|||
Resolution |
0.001 µm *5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
- |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range. | ||||

Specifications
Model |
SI-F80U3 |
|||
Measurement range |
0.05 to 1.1 mm 0.002" to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range. | ||||

Specifications
Model |
SI-FA100*1 |
|||
Separate type |
SI-FA100 |
|||
Type |
Expansion controller*2 |
|||
No. of connectable spectrum units |
1 |
|||
Display |
Minimum display unit |
N/A |
||
Display range | ||||
Display cycle | ||||
Terminal block |
Laser remote interlock input |
N/A*3 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 1 output, Output impedance: 100 Ω*3 |
|||
Analog current output |
4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*3 |
|||
Alarm output |
N/A*3 |
|||
General comparator output | ||||
Expansion connector |
TIMING2 input |
|||
RESET input | ||||
Auto-zero input | ||||
Program switch input | ||||
Alarm output | ||||
Comparator/ binary output |
Binary output |
|||
Strobe output | ||||
Binary selection output | ||||
Binary selection input | ||||
RS-232C interface |
N/A |
|||
USB interface | ||||
Ethernet interface | ||||
Major functions |
12 Out simultaneous measurement |
|||
Rating |
Power voltage |
Supplied from the main controller |
||
Current consumption | ||||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*4 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 300 g |
|||
*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). | ||||

Specifications
Model |
SI-FA103 |
|||
Separate type | ||||
Type |
Expansion controller*1 |
|||
No. of connectable spectrum units |
1 |
|||
Display |
Minimum display unit |
N/A |
||
Display range | ||||
Display cycle | ||||
Terminal block |
Laser remote interlock input |
N/A*2 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 1 outputs, Output impedance: 100 Ω*2 |
|||
Analog current output |
4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*2 |
|||
Alarm output |
N/A*2 |
|||
General comparator output | ||||
Expansion connector |
TIMING2 input |
|||
RESET input | ||||
Auto-zero input | ||||
Program switch input | ||||
Alarm output | ||||
Comparator/ binary output |
Binary output |
|||
Strobe output | ||||
Binary selection output | ||||
Binary selection input | ||||
RS-232C interface |
N/A |
|||
USB interface | ||||
Ethernet interface | ||||
Major functions |
12 Out simultaneous measurement |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*3 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 300 g |
|||
*1 Up to four expansion controllers can be connected to the main controller. | ||||

Specifications
Model |
SI-FD500 |
|||
Type |
Main Controller Separate type*1 |
|||
No. of connectable spectrum units |
2 |
|||
Display |
Minimum display unit |
0.001 µm |
||
Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
|||
Display cycle |
10 times/sec. |
|||
Terminal block |
Laser remote interlock input |
Non-voltage input*2 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*2 |
|||
Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*2 |
|||
Alarm output |
NPN open-collector output (N.C.)*2 |
|||
General comparator output |
NPN open-collector output*2 |
|||
Expansion connector |
TIMING2 input |
Non-voltage input*2 |
||
RESET input | ||||
Auto-zero input | ||||
Program switch input |
Non-voltage input x 3 inputs*2 |
|||
Alarm output |
NPN open-collector output (N.C.)*2 |
|||
Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*2 |
||
Strobe output |
NPN open-collector output*2 |
|||
Binary selection output | ||||
Binary selection input |
Non-voltage input*2 |
|||
RS-232C interface |
Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) |
|||
USB interface |
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) |
|||
Ethernet interface |
100Base-TX/10Base-T |
|||
Major functions |
12 Out simultaneous measurement |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*3 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 600 g |
|||
*1 The SI-F1001 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H1). | ||||

Specifications
Model |
SI-H1*1 |
|||
Type |
Configuration Software for the SI Series |
|||
Operating System |
Windows 11 Pro |
|||
CPU |
Pentium III 1 GHz or higher (1.7 GHz or higher recommended) |
|||
Memory capacity |
256 MB or more (1 GB or more recommended) |
|||
Available hard disk space |
1 GB or more |
|||
Display |
1024 x 768 pixels, 24-bit full color or better |
|||
PC interface |
The PC must be equipped with one of these interfaces: |
|||
*1 Use under an environment that exceeds the recommended environment of the your OS. | ||||

Specifications
Model |
SI-H13*1 |
|||
Type |
Configuration Software for the SI Series |
|||
Operating System |
Windows 11 Pro |
|||
CPU |
Pentium III 1 GHz or higher (1.7 GHz or higher recommended) |
|||
Memory capacity |
256 MB or more (1 GB or more recommended) |
|||
Available hard disk space |
1 GB or more |
|||
Display |
1024 x 768 pixels, 24-bit full color or better |
|||
PC interface |
The PC must be equipped with one of these interfaces: |
|||
*1 Use under an environment that exceeds the recommended environment of the your OS. | ||||

PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

Specifications
Model |
SJ-C10H |
|||
Type |
10 pin to 10 pin cable |
|||
Applicable product |
SJ-H036* |
|||
Length |
10 m 32.8' |
|||

Specifications
Model |
SJ-C3 |
|||
Type |
Controller/high voltage source extension cable |
|||
Applicable product |
SJ-M100/200/300/400 or SJ-F100 |
|||
Length |
3 m 9.84' |
|||

Specifications
Model |
SJ-C5H |
|||
Type |
10 pin to 10 pin cable |
|||
Applicable product |
SJ-H036* |
|||
Length |
5 m 16.4' |
|||





