Optical Metrology Systems

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Keyence OP-88743 Keyence

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Keyence OP-88552 Keyence

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Keyence OP-88368 Keyence

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Keyence OP-88367 Keyence

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PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

Keyence OP-88239 Keyence

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Keyence OP-88185 Keyence

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Specifications

Model				OP-88185
Type				Fixture sheet
Overview				This Sheet is for fixing the object by sticking on the stage glass of the IM-7000 Series.
Number included				10 pieces

Keyence OP-88179 Keyence

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Specifications

Model				OP-88179
Type				Stage glass
Overview				One of these is included with the purchase of the IM-7020 or 7010.
Applicable product				IM-7010, IM-7020

Keyence LM-XSG1 Keyence

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Keyence LM-X100TL Keyence

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Specifications

Model				LM-X100TL
Type				Head
Image sensor				1", 20-megapixel monochrome CMOS
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		325 mm × 175 mm 12.80" × 6.89"
		High-precision measurement mode		306 mm × 156 mm 12.05" × 6.14"
	Minimum display unit			0.1 μm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 μm
			High-precision measurement mode	±0.1 μm
		With stage movement	X/Y axis	±0.9 μm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 μm ^*1
			High-precision measurement mode	±0.7 μm ^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) μm ^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) μm ^*3
AF height measurement	Repeatability			±2 μm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
Laser height measurement	Measurable range (X/Y)			239 mm × 146 mm 9.41" × 5.75"
	Minimum display unit			0.1 μm
	Repeatability			±0.6 μm ^*5
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
	Spot diameter			ø50 μm
	Laser class			Class 1
Touch probe measurement	Measurable range (X/Y)			248 mm × 141 mm 9.76" × 5.55"
	Measuring force			0.015 N ^*6
	Minimum display unit			0.1 μm
	Repeatability	X/Y axis		±1.4 μm
		X/Y plane
		Z-axis
	Measurement accuracy	X/Y axis (EUX,MPE EUY,MPE)		±(2.8 + 0.02 L) μm ^*7
		X/Y plane (EUXY,MPE)		±(3.8 + 0.02 L) μm ^*7
		Z axis (EUZ,MPE)		±(4.8 + 0.04 L) μm ^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load: 24 VDC, 0.5 A ON resistance: 50 mΩ or lower
Illumination system	Transparent			Telecentric transparent green LED illumination
	Ring			Four division, multi-angle color LED/ white LED illumination (electric) Slit ring (directivity) side green LED illumination (electric) Telecentric coaxial white LED illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 VDC
	Output current			1.6 A (max.)
XY stage	Moving range			300 mm × 150 mm 11.81" × 5.91" (motorized)
	Withstand load			7 kg 15.43 lb
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 VAC ±10% (50/60 Hz)
	Power consumption			150 VA or less
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F ^*8
	Relative humidity			20 to 80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 35 kg 77.16 lb
^1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units) ^5 In-house measurement of a standard target at an operating ambient temperature of +23°C ±1°C +73.4°F ±1.8°F ^6 Typical value ^7 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^8 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

Keyence LM-X100T Keyence

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Specifications

Model				LM-X100T
Type				Head
Image sensor				1", 20-megapixel monochrome CMOS
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		325 mm × 175 mm 12.80" × 6.89"
		High-precision measurement mode		306 mm × 156 mm 12.05" × 6.14"
	Minimum display unit			0.1 μm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 μm
			High-precision measurement mode	±0.1 μm
		With stage movement	X/Y axis	±0.9 μm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 μm ^*1
			High-precision measurement mode	±0.7 μm ^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) μm ^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) μm ^*3
AF height measurement	Repeatability			±2 μm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
Touch probe measurement	Measurable range (X/Y)			248 mm × 141 mm 9.76" × 5.55"
	Measuring force			0.015 N ^*5
	Minimum display unit			0.1 μm
	Repeatability	X/Y axis		±1.4 μm
		X/Y plane
		Z-axis
	Measurement accuracy	X/Y axis (EUX,MPE EUY,MPE)		±(2.8 + 0.02 L) μm ^*6
		X/Y plane (EUXY,MPE)		±(3.8 + 0.02 L) μm ^*6
		Z axis (EUZ,MPE)		±(4.8 + 0.04 L) μm ^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load: 24 VDC, 0.5 A ON resistance: 50 mΩ or lower
Illumination system	Transparent			Telecentric transparent green LED illumination
	Ring			Four division, multi-angle color LED/ white LED illumination (electric) Slit ring (directivity) side green LED illumination (electric) Telecentric coaxial white LED illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 VDC
	Output current			1.6 A (max.)
XY stage	Moving range			300 mm × 150 mm 11.81" × 5.91" (motorized)
	Withstand load			7 kg 15.43 lb
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 VAC ±10% (50/60 Hz)
	Power consumption			150 VA or less
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F ^*7
	Relative humidity			20 to 80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 34 kg 74.96 lb
^1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units) ^5 Typical value ^6 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^*7 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

Keyence LM-SG1 Keyence

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Keyence LM-X100L Keyence

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Specifications

Model				LM-X100L
Type				Head
Image sensor				1", 20-megapixel monochrome CMOS
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		325 mm × 175 mm 12.80" × 6.89"
		High-precision measurement mode		306 mm × 156 mm 12.05" × 6.14"
	Minimum display unit			0.1 μm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 μm
			High-precision measurement mode	±0.1 μm
		With stage movement	X/Y axis	±0.9 μm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 μm ^*1
			High-precision measurement mode	±0.7 μm ^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) μm ^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) μm ^*3
AF height measurement	Repeatability			±2 μm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
Laser height measurement	Measurable range (X/Y)			239 mm × 146 mm 9.41" × 5.75"
	Minimum display unit			0.1 μm
	Repeatability			±0.6 μm ^*5
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm ^*4
	Spot diameter			ø50 μm
	Laser class			Class 1
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load: 24 VDC, 0.5 A ON resistance: 50 mΩ or lower
Illumination system	Transparent			Telecentric transparent green LED illumination
	Ring			Four division, multi-angle color LED/ white LED illumination (electric) Slit ring (directivity) side green LED illumination (electric) Telecentric coaxial white LED illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 VDC
	Output current			1.6 A (max.)
XY stage	Moving range			300 mm × 150 mm 11.81" × 5.91" (motorized)
	Withstand load			7 kg 15.43 lb
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 VAC ±10% (50/60 Hz)
	Power consumption			150 VA or less
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F ^*6
	Relative humidity			20 to 80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 34 kg 74.96 lb
^1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units) ^4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units) ^5 In-house measurement of a standard target at an operating ambient temperature of +23°C ±1°C +73.4°F ±1.8°F ^6 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

Keyence LM-H1X Keyence

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Keyence LM-H1XE Keyence

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PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

Keyence LM-H1XC Keyence

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PLC Direct is not an authorized distributor. We offer a broad range of in-stock products with minimal lead time.

Keyence LM-H1EA Keyence

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Specifications

Model				LM-H1EA
Supported OS				Windows 10 (64-bit version) Windows 11
Required free space on hard disk				30 GB or more

Keyence LM-H1C Keyence

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Specifications

Model				LM-H1C
Supported OS				Windows 10 (64-bit version) Windows 11
Required free space on hard disk				30 GB or more

Keyence LM-1100 Keyence

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Specifications

Model				LM-1100
Type				Head
Image sensor				1", 20-mega pixel monochrome CMOS
Display				10.4" LCD monitor (XGA: 1024 × 768)
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		225 mm × 125 mm 8.86" × 4.92"
		High-precision measurement mode		206 mm × 106 mm 8.11" × 4.17"
	Minimum display unit			0.1 µm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 µm
			High-precision measurement mode	±0.1 µm
		With stage movement	X/Y axis	±0.9 µm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 µm^*1
			High-precision measurement mode	±0.7 µm^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) µm^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) µm^*3
AF height measurement	Repeatability			±2 µm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) µm^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load 24 V DC, 0.5 A ON resistance 50 mΩ or lower
Interface	LAN			RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1			2 ports (rear: 2)
	USB 2.0 Series A			4 ports (front: 2, rear: 2)
	Monitor output			DVI-D
Record	Hard disk drive			500 GB
Illumination system	Transparent			Telecentric transparent illumination
	Ring			Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric) Telecentric coaxial illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 V DC
	Output current			1.6 A (max.)
XY stage	Moving range			200 mm × 100 mm 7.87" × 3.94" (electric)
	Withstand load			7 kg
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 V AC ±10% (50/60 Hz)
	Power consumption			430 VA or lower
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F^*5
	Relative humidity			20–80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 30 kg
^1 In the range of 20 mm × 20 mm 0.79" × 0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position. ^2 In the range of 5 mm × 5 mm 0.20" × 0.20" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units) ^4 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to a maximum measurement of 50 mm 1.97" or less, (L = amount of Z stage movement in mm units). ^*5 +15 to 35°C +59 to 95°F with X/Y stage travel speed of 80 mm/s.

Keyence LM-1001 Keyence

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Specifications

Model				LM-1001
Type				Controller
Image sensor				1", 20-mega pixel monochrome CMOS
Display				10.4" LCD monitor (XGA: 1024 × 768)
Receiver lens				Double telecentric lens
Image measurement	Field of view	Wide-field measurement mode		225 mm × 125 mm 8.86" × 4.92"
		High-precision measurement mode		206 mm × 106 mm 8.11" × 4.17"
	Minimum display unit			0.1 μm
	Repeatability	Inside camera's field of view (2σ)	Wide-field measurement mode	±0.5 μm
			High-precision measurement mode	±0.1 μm
		With stage movement	X/Y axis	±0.9 μm
			X/Y plane
	Measurement accuracy	Inside camera's field of view (2σ)	Wide-field measurement mode	±2 μm^*1
			High-precision measurement mode	±0.7 μm^*2
		With stage movement	X/Y axis (EUX,MPE , EUY,MPE)	±(1.8 + 0.02 L) μm^*3
			X/Y plane (EUXY,MPE)	±(2.8 + 0.02 L) μm^*3
AF height measurement	Repeatability			±2 μm
	Measurement accuracy (EUZ,MPE)			±(4.8 + 0.04 L) μm^*4
External remote input				Non-voltage input (with and without contact)
External output	OK/NG/FAIL/MEAS.			PhotoMOS output Rated load 24 V DC, 0.5 A ON resistance 50 mΩ or lower
Interface	LAN			RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
	USB 3.1			2 ports (rear: 2)
	USB 2.0 Series A			4 ports (front: 2, rear: 2)
	Monitor output			DVI-D
Record	Hard disk drive			500 GB
Illumination system	Transparent			Telecentric transparent illumination
	Ring			Four division, multi-angle illumination (electric) Slit ring (directivity) illumination (electric) Telecentric coaxial illumination
External illumination control	Intensity control			PWM control, 100 kHz
	Output voltage			12 V DC
	Output current			1.6 A (max.)
XY stage	Moving range			200 mm × 100 mm 7.87" × 3.94" (electric)
	Withstand load			7 kg
Z stage	Moving range			75 mm 2.95" (electric)
Power supply	Power voltage			100 to 240 V AC ±10% (50/60 Hz)
	Power consumption			430 VA or lower
Environmental resistance	Ambient temperature			+10 to 35°C +50 to 95°F^*5
	Relative humidity			20–80% RH (no condensation)
	Overvoltage category			ll
	Pollution degree			2
Weight				Approx. 8 kg
^1 In the range of 20 mm × 20 mm 0.79" × 0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position. ^2 In the range of 5 mm × 5 mm 0.20" × 0.20" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position ^3 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units) ^4 In accordance with ISO10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to a maximum measurement of 50 mm 1.97" or less, (L = amount of Z stage movement in mm units). ^*5 +15 to 35°C +59 to 95°F with X/Y stage travel speed of 80 mm/s.