Keyence

LM-X100T Keyence

Specifications

Model

LM-X100T

Type

Head

Image sensor

1", 20-megapixel monochrome CMOS

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

325 mm × 175 mm 12.80" × 6.89"

High-precision measurement mode

306 mm × 156 mm 12.05" × 6.14"

Minimum display unit

0.1 μm

Repeatability

Inside camera's field of view (2σ)

Wide-field measurement mode

±0.5 μm

High-precision measurement mode

±0.1 μm

With stage movement

X/Y axis

±0.9 μm

X/Y plane

Measurement accuracy

Inside camera's field of view (2σ)

Wide-field measurement mode

±2 μm *1

High-precision measurement mode

±0.7 μm *2

With stage movement

X/Y axis (EUX,MPE , EUY,MPE)

±(1.8 + 0.02 L) μm *3

X/Y plane (EUXY,MPE)

±(2.8 + 0.02 L) μm *3

AF height measurement

Repeatability

±2 μm

Measurement accuracy (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

Touch probe measurement

Measurable range (X/Y)

248 mm × 141 mm 9.76" × 5.55"

Measuring force

0.015 N *5

Minimum display unit

0.1 μm

Repeatability

X/Y axis

±1.4 μm

X/Y plane

Z-axis

Measurement accuracy

X/Y axis (EUX,MPE EUY,MPE)

±(2.8 + 0.02 L) μm *6

X/Y plane (EUXY,MPE)

±(3.8 + 0.02 L) μm *6

Z axis (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMOS output
Rated load: 24 VDC, 0.5 A
ON resistance: 50 mΩ or lower

Illumination system

Transparent

Telecentric transparent green LED illumination

Ring

Four division, multi-angle color LED/ white LED illumination (electric)
Slit ring (directivity) side green LED illumination (electric)
Telecentric coaxial white LED illumination

External illumination control

Intensity control

PWM control, 100 kHz

Output voltage

12 VDC

Output current

1.6 A (max.)

XY stage

Moving range

300 mm × 150 mm 11.81" × 5.91"
(motorized)

Withstand load

7 kg 15.43 lb

Z stage

Moving range

75 mm 2.95" (electric)

Power supply

Power voltage

100 to 240 VAC ±10% (50/60 Hz)

Power consumption

150 VA or less

Environmental resistance

Ambient temperature

+10 to 35°C +50 to 95°F *7

Relative humidity

20 to 80% RH (no condensation)

Overvoltage category

ll

Pollution degree

2

Weight

Approx. 34 kg 74.96 lb

*1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units)
*5 Typical value
*6 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*7 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F


Description
Warranty
Shipping and Return

Specifications

Model

LM-X100T

Type

Head

Image sensor

1", 20-megapixel monochrome CMOS

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

325 mm × 175 mm 12.80" × 6.89"

High-precision measurement mode

306 mm × 156 mm 12.05" × 6.14"

Minimum display unit

0.1 μm

Repeatability

Inside camera's field of view (2σ)

Wide-field measurement mode

±0.5 μm

High-precision measurement mode

±0.1 μm

With stage movement

X/Y axis

±0.9 μm

X/Y plane

Measurement accuracy

Inside camera's field of view (2σ)

Wide-field measurement mode

±2 μm *1

High-precision measurement mode

±0.7 μm *2

With stage movement

X/Y axis (EUX,MPE , EUY,MPE)

±(1.8 + 0.02 L) μm *3

X/Y plane (EUXY,MPE)

±(2.8 + 0.02 L) μm *3

AF height measurement

Repeatability

±2 μm

Measurement accuracy (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

Touch probe measurement

Measurable range (X/Y)

248 mm × 141 mm 9.76" × 5.55"

Measuring force

0.015 N *5

Minimum display unit

0.1 μm

Repeatability

X/Y axis

±1.4 μm

X/Y plane

Z-axis

Measurement accuracy

X/Y axis (EUX,MPE EUY,MPE)

±(2.8 + 0.02 L) μm *6

X/Y plane (EUXY,MPE)

±(3.8 + 0.02 L) μm *6

Z axis (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMOS output
Rated load: 24 VDC, 0.5 A
ON resistance: 50 mΩ or lower

Illumination system

Transparent

Telecentric transparent green LED illumination

Ring

Four division, multi-angle color LED/ white LED illumination (electric)
Slit ring (directivity) side green LED illumination (electric)
Telecentric coaxial white LED illumination

External illumination control

Intensity control

PWM control, 100 kHz

Output voltage

12 VDC

Output current

1.6 A (max.)

XY stage

Moving range

300 mm × 150 mm 11.81" × 5.91"
(motorized)

Withstand load

7 kg 15.43 lb

Z stage

Moving range

75 mm 2.95" (electric)

Power supply

Power voltage

100 to 240 VAC ±10% (50/60 Hz)

Power consumption

150 VA or less

Environmental resistance

Ambient temperature

+10 to 35°C +50 to 95°F *7

Relative humidity

20 to 80% RH (no condensation)

Overvoltage category

ll

Pollution degree

2

Weight

Approx. 34 kg 74.96 lb

*1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units)
*5 Typical value
*6 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*7 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.

If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.

In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.

PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.

Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.

PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

Price on request
Ask for quote
   

Notify Me When Available
Description
Warranty
Shipping and Return

Specifications

Model

LM-X100T

Type

Head

Image sensor

1", 20-megapixel monochrome CMOS

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

325 mm × 175 mm 12.80" × 6.89"

High-precision measurement mode

306 mm × 156 mm 12.05" × 6.14"

Minimum display unit

0.1 μm

Repeatability

Inside camera's field of view (2σ)

Wide-field measurement mode

±0.5 μm

High-precision measurement mode

±0.1 μm

With stage movement

X/Y axis

±0.9 μm

X/Y plane

Measurement accuracy

Inside camera's field of view (2σ)

Wide-field measurement mode

±2 μm *1

High-precision measurement mode

±0.7 μm *2

With stage movement

X/Y axis (EUX,MPE , EUY,MPE)

±(1.8 + 0.02 L) μm *3

X/Y plane (EUXY,MPE)

±(2.8 + 0.02 L) μm *3

AF height measurement

Repeatability

±2 μm

Measurement accuracy (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

Touch probe measurement

Measurable range (X/Y)

248 mm × 141 mm 9.76" × 5.55"

Measuring force

0.015 N *5

Minimum display unit

0.1 μm

Repeatability

X/Y axis

±1.4 μm

X/Y plane

Z-axis

Measurement accuracy

X/Y axis (EUX,MPE EUY,MPE)

±(2.8 + 0.02 L) μm *6

X/Y plane (EUXY,MPE)

±(3.8 + 0.02 L) μm *6

Z axis (EUZ,MPE)

±(4.8 + 0.04 L) μm *4

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMOS output
Rated load: 24 VDC, 0.5 A
ON resistance: 50 mΩ or lower

Illumination system

Transparent

Telecentric transparent green LED illumination

Ring

Four division, multi-angle color LED/ white LED illumination (electric)
Slit ring (directivity) side green LED illumination (electric)
Telecentric coaxial white LED illumination

External illumination control

Intensity control

PWM control, 100 kHz

Output voltage

12 VDC

Output current

1.6 A (max.)

XY stage

Moving range

300 mm × 150 mm 11.81" × 5.91"
(motorized)

Withstand load

7 kg 15.43 lb

Z stage

Moving range

75 mm 2.95" (electric)

Power supply

Power voltage

100 to 240 VAC ±10% (50/60 Hz)

Power consumption

150 VA or less

Environmental resistance

Ambient temperature

+10 to 35°C +50 to 95°F *7

Relative humidity

20 to 80% RH (no condensation)

Overvoltage category

ll

Pollution degree

2

Weight

Approx. 34 kg 74.96 lb

*1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*2 In the range of 5 mm × 5 mm 0.20" × 0.20", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F, set to measurement of a target with a maximum height of 50 mm 1.97" or less, (L = amount of Z stage movement in mm inch units)
*5 Typical value
*6 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage (L = amount of X/Y stage movement in mm inch units)
*7 With an XY-motorized stage travel speed of 80 mm/s 3.15 inch/s: +15 to 35°C +59°F to 95°F

All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.

If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.

In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.

PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.

Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.

PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

Trusted By

"Fast service for obsolete parts"

Increasingly PLC/ HMI control platforms are becoming obsolete and parts are no longer supported, however PLC Direct had the HMI we needed and fast shipping for our system to get back online!

Buyer at GE Health

"Helping us move projects forward"

With supply chain issues increasingly affecting our business, PLC Direct has been there for us to supply the PLC products we need, when we need it. If they don't have it readily available, they find it and provide it quickly and reliably. This has helped us move forward with several projects that would have otherwise taken us many, many months to complete.

Buyer at E-Merge Systems – A Rockwell Integrator

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