Optical Metrology Systems
74 products
Showing 25 - 48 of 74 products










Specifications
Model |
LM-XC100TL2 |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
25 0.98" × 25 0.98" |
|
High-precision mode [mm inch] |
6 0.24" × 6 0.24" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
0.5 μm |
|
High-precision mode |
0.1 μm |
|||
Measurement accuracy |
Wide-field mode |
1.8 µm*1 |
||
High-precision mode |
0.7 µm*2 |
|||
Laser height |
Reference distance |
15 mm 0.59" |
||
Repeatability |
σ ≦ 0.45 µm |
|||
Spot diameter |
ø10 µm |
|||
Linearity |
±0.35 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
±1 μm |
||
Measuring force |
0.015 N*4 |
|||
AF height |
Repeatability |
±2 μm |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED, telecentric coaxial illumination | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
11 kg 24.25 lb |
|||
*1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
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Specifications
Model |
LM-XC100TL |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
25 0.98" × 25 0.98" |
|
High-precision mode [mm inch] |
6 0.24" × 6 0.24" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
0.5 μm |
|
High-precision mode |
0.1 μm |
|||
Measurement accuracy |
Wide-field mode |
1.8 µm*1 |
||
High-precision mode |
0.7 µm*2 |
|||
Laser height |
Reference distance |
70 mm 2.76" |
||
Repeatability |
σ ≦ 0.6 µm |
|||
Spot diameter |
ø50 µm |
|||
Linearity |
±2 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
±1 μm |
||
Measuring force |
0.015 N*4 |
|||
AF height |
Repeatability |
±2 μm |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED, telecentric coaxial illumination | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
11 kg 24.25 lb |
|||
*1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
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Specifications
Model |
LM-XC100T |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
25 0.98" × 25 0.98" |
|
High-precision mode [mm inch] |
6 0.24" × 6 0.24" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
0.5 μm |
|
High-precision mode |
0.1 μm |
|||
Measurement accuracy |
Wide-field mode |
1.8 µm*1 |
||
High-precision mode |
0.7 µm*2 |
|||
Laser height |
Reference distance |
— |
||
Repeatability | ||||
Spot diameter | ||||
Linearity | ||||
Laser class | ||||
Touch probe |
Repeatability |
±1 μm |
||
Measuring force |
0.015 N*3 |
|||
AF height |
Repeatability |
±2 μm |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED, telecentric coaxial illumination | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
10 kg 22.05 lb |
|||
*1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
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Specifications
Model |
LM-XC100L |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
25 0.98" × 25 0.98" |
|
High-precision mode [mm inch] |
6 0.24" × 6 0.24" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
0.5 μm |
|
High-precision mode |
0.1 μm |
|||
Measurement accuracy |
Wide-field mode |
1.8 µm*1 |
||
High-precision mode |
0.7 µm*2 |
|||
Laser height |
Reference distance |
70 mm 2.76" |
||
Repeatability |
σ ≦ 0.6 µm |
|||
Spot diameter |
ø50 µm |
|||
Linearity |
±2 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
— |
||
Measuring force | ||||
AF height |
Repeatability |
±2 μm |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED, telecentric coaxial illumination | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
11 kg 24.25 lb |
|||
*1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
LM-XC100 |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
25 0.98" × 25 0.98" |
|
High-precision mode [mm inch] |
6 0.24" × 6 0.24" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
0.5 μm |
|
High-precision mode |
0.1 μm |
|||
Measurement accuracy |
Wide-field mode |
1.8 µm*1 |
||
High-precision mode |
0.7 µm*2 |
|||
Laser height |
Reference distance |
— |
||
Repeatability | ||||
Spot diameter | ||||
Linearity | ||||
Laser class | ||||
Touch probe |
Repeatability |
|||
Measuring force | ||||
AF height |
Repeatability |
±2 μm |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED, telecentric coaxial illumination | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
9 kg 19.84 lb |
|||
*1 In the range of 20 × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
IM-XC100TL |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
ø100 ø3.94" |
|
High-precision mode [mm inch] |
25 0.98" × 25 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
1 µm |
|
High-precision mode |
0.5 μm |
|||
Measurement accuracy |
Wide-field mode |
3.5 µm*1 |
||
High-precision mode |
1.8 µm*2 |
|||
Laser height |
Reference distance |
70 mm 2.76" |
||
Repeatability |
σ ≦ 0.6 µm |
|||
Spot diameter |
ø50 µm |
|||
Linearity |
±2 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
±1 μm |
||
Measuring force |
0.015 N*4 |
|||
AF height |
Repeatability |
— |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED coaxial illumination (optional) | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
12 kg 26.46 lb |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
IM-XC100T |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
ø100 ø3.94" |
|
High-precision mode [mm inch] |
25 0.98" × 25 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
1 µm |
|
High-precision mode |
0.5 μm |
|||
Measurement accuracy |
Wide-field mode |
3.5 µm*1 |
||
High-precision mode |
1.8 µm*2 |
|||
Laser height |
Reference distance |
— |
||
Repeatability | ||||
Spot diameter | ||||
Linearity | ||||
Laser class | ||||
Touch probe |
Repeatability |
±1 μm |
||
Measuring force |
0.015 N*3 |
|||
AF height |
Repeatability |
— |
||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED coaxial illumination (optional) | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
11 kg 24.25 lb |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
IM-XC100L |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
ø100 ø3.94" |
|
High-precision mode [mm inch] |
25 0.98" × 25 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
1 µm |
|
High-precision mode |
0.5 μm |
|||
Measurement accuracy |
Wide-field mode |
3.5 µm*1 |
||
High-precision mode |
1.8 µm*2 |
|||
Laser height |
Reference distance |
70 mm 2.76" |
||
Repeatability |
σ ≦ 0.6 µm |
|||
Spot diameter |
ø50 µm |
|||
Linearity |
±2 μm*3 |
|||
Laser class |
Class 1 |
|||
Touch probe |
Repeatability |
— |
||
Measuring force | ||||
AF height |
Repeatability |
|||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED coaxial illumination (optional) | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
12 kg 26.46 lb |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
IM-XC100 |
|||
Type |
Head |
|||
Image measurement |
Field of view |
Wide-field mode [mm inch] |
ø100 ø3.94" |
|
High-precision mode [mm inch] |
25 0.98" × 25 0.98" |
|||
Minimum display unit |
0.1 μm |
|||
Repeatability |
Within field of view (2σ) |
Wide-field mode |
1 µm |
|
High-precision mode |
0.5 μm |
|||
Measurement accuracy |
Wide-field mode |
3.5 µm*1 |
||
High-precision mode |
1.8 µm*2 |
|||
Laser height |
Reference distance |
— |
||
Repeatability | ||||
Spot diameter | ||||
Linearity | ||||
Laser class | ||||
Touch probe |
Repeatability |
|||
Measuring force | ||||
AF height |
Repeatability |
|||
Illumination system |
Transparent |
Green LED, telecentric transparent illumination |
||
Coaxial |
Color LED, white LED, four-division multi-angle illumination (electric) |
|||
Green LED, slit ring (directivity) lateral illumination (electric) | ||||
White LED coaxial illumination (optional) | ||||
Environmental resistance |
Ambient temperature |
+10 to 35°C +50°F to 95°F |
||
Weight |
10 kg 22.05 lb |
|||
*1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23±1°C +73.4±1.8°F at the focal point position. | ||||
Scroll

Specifications
Model |
IM-X1540 |
|||
Type |
Stage unit |
|||
Head used |
IM Head, LM Head |
|||
Measurement range (X × Y) |
Image measurement |
Wide-field mode [mm inch] |
IM Head: 500 × 400 19.69" × 15.75", LM Head: 425 × 325 16.73" × 12.80" |
|
High-precision mode [mm inch] |
IM Head: 425 × 325 16.73" × 12.80", LM Head: 406 × 306 15.98" × 12.05" |
|||
AF height [mm inch] |
IM Head: —, LM Head: 400 × 300 15.75" × 11.81" |
|||
Laser height [mm inch] |
IM Head: 368 × 268 14.49" × 10.55", LM Head: 396 × 239 15.59" × 9.41" |
|||
Touch probe [mm inch] |
IM Head: 346 × 296 13.62" × 11.65", LM Head: 350 × 296 13.78" × 11.65" |
|||
Z stage |
Moving range [mm inch] |
200 7.87" |
||
Measurement accuracy |
X/Y axis (EUX, MPE EUY, MPE) |
1.8 + 0.02 L µm*1 *2 |
||
X/Y plane (EUXY, MPE) |
2.8 + 0.02 L µm*1 *2 |
|||
Z axis (EUZ, MPE) |
3.8 + 0.04 L µm*3 *4 |
|||
Load capacity |
15 kg*5 33.07 lb |
|||
Ratings |
Power voltage |
24 VDC |
||
Current consumption |
7.5 A |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*6 +50°F to 95°F |
||
Weight |
70 kg 154.32 lb |
|||
*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. | ||||
Scroll

Specifications
Model |
IM-X1330 |
|||
Type |
Stage unit |
|||
Head used |
IM Head, LM Head |
|||
Measurement range (X × Y) |
Image measurement |
Wide-field mode [mm inch] |
IM Head: 300 × 300 11.81" × 11.81", LM Head: 225 × 225 8.86" × 8.86" |
|
High-precision mode [mm inch] |
IM Head: 225 × 225 8.86" × 8.86", LM Head: 206 × 206 8.11" × 8.11" |
|||
AF height [mm inch] |
IM Head: —, LM Head: 200 × 200 7.87" × 7.87" |
|||
Laser height [mm inch] |
IM Head: 168 × 168 6.61" × 6.61", LM Head: 196 × 139 7.72" × 5.47" |
|||
Touch probe [mm inch] |
IM Head: 146 × 196 5.75" × 7.72", LM Head: 150 × 196 5.91" × 7.72" |
|||
Z stage |
Moving range [mm inch] |
150 5.91" |
||
Measurement accuracy |
X/Y axis (EUX, MPE EUY, MPE) |
1.8 + 0.02 L µm*1 *2 |
||
X/Y plane (EUXY, MPE) |
2.8 + 0.02 L µm*1 *2 |
|||
Z axis (EUZ, MPE) |
3.8 + 0.04 L µm*3 *4 |
|||
Load capacity |
15 kg*5 33.07 lb |
|||
Ratings |
Power voltage |
24 VDC |
||
Current consumption |
7.5 A |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*6 +50°F to 95°F |
||
Weight |
32 kg 70.55 lb |
|||
*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. | ||||
Scroll

Specifications
Model |
IM-X1220 |
|||
Type |
Stage unit |
|||
Head used |
IM Head, LM Head |
|||
Measurement range (X × Y) |
Image measurement |
Wide-field mode [mm inch] |
IM Head: 200 × 200 7.87" × 7.87", LM Head: 125 × 125 4.92" × 4.92" |
|
High-precision mode [mm inch] |
IM Head: 125 × 125 4.92" × 4.92", LM Head: 106 × 106 4.17" × 4.17" |
|||
AF height [mm inch] |
IM Head: —, LM Head: 100 × 100 3.94" × 3.94" |
|||
Laser height [mm inch] |
— |
|||
Touch probe [mm inch] | ||||
Z stage |
Moving range [mm inch] |
150 5.91" |
||
Measurement accuracy |
X/Y axis (EUX, MPE EUY, MPE) |
1.8 + 0.02 L µm*1 *2 |
||
X/Y plane (EUXY, MPE) |
2.8 + 0.02 L µm*1 *2 |
|||
Z axis (EUZ, MPE) |
IM Head: —, LM Head: 3.8 + 0.04 L µm*3 *4 |
|||
Load capacity |
15 kg*5 33.07 lb |
|||
Ratings |
Power voltage |
24 VDC |
||
Current consumption |
7.5 A |
|||
Environmental resistance |
Ambient temperature |
+10 to 35°C*6 +50°F to 95°F |
||
Weight |
29 kg 63.93 lb |
|||
*1 In accordance with ISO10360-7, L is the amount of X/Y stage movement (in mm) when within the operating ambient temperature range of +23±1°C +73.4±1.8°F and with a load weighing 2 kg 4.41 lb or less on the stage. | ||||
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