Keyence

VK-X3000 Keyence

Specifications

Model

VK-X3000

Type

Controller

Total magnification

42 to 28800×*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

VK-X3100: Semiconductor laser, 404 nm
VK-X3050: Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz*2

Max. laser output

1.0 mW

Laser class

Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm
VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm
VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less*4

Focus variation

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm*5

Repeatability of RMS

0.008 nm*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm*5

Accuracy

±0.6%*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 3 kg

*1 When using a 23-inch full-screen display.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm.
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.
*4 When measuring a standard sample with a 20× or greater lens.
*5 Typical values under the default measurement environment.


Description
Warranty
Shipping and Return

Specifications

Model

VK-X3000

Type

Controller

Total magnification

42 to 28800×*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

VK-X3100: Semiconductor laser, 404 nm
VK-X3050: Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz*2

Max. laser output

1.0 mW

Laser class

Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm
VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm
VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less*4

Focus variation

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm*5

Repeatability of RMS

0.008 nm*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm*5

Accuracy

±0.6%*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 3 kg

*1 When using a 23-inch full-screen display.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm.
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.
*4 When measuring a standard sample with a 20× or greater lens.
*5 Typical values under the default measurement environment.

All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.

If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.

In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.

PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.

Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.

PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

Price on request
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Description
Warranty
Shipping and Return

Specifications

Model

VK-X3000

Type

Controller

Total magnification

42 to 28800×*1

Field of view

11 to 7398 μm

Measurement principle

Laser confocal, Focus variation, White light interferometry, Spectral interference

Laser wavelength

VK-X3100: Semiconductor laser, 404 nm
VK-X3050: Semiconductor laser, 661 nm

Max. laser measurement speed

Surface: 125 Hz, Line: 7900 Hz*2

Max. laser output

1.0 mW

Laser class

Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3)

Laser light-receiving element

16-bit photomultiplier

White light source

White LED

White-light-receiving element

High-definition color CMOS

Laser confocal

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm
VK-X3050: 10×: 100 nm, 20×: 40 nm, 50×: 20 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm
VK-X3050: 10×: 400 nm, 20×: 100 nm, 50×: 50 nm

Width accuracy

Measured value ±2% or less*4

Focus variation

Height display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Height repeatability σ

VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
VK-X3050: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 30 nm

Height accuracy

0.2+L/ 100 μm or less*4

Width display resolution

VK-X3100: 0.1 nm
VK-X3050: 1 nm

Width repeatability 3σ

VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
VK-X3050: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 65 nm

Width accuracy

Measured value ±2% or less*4

White light interferometry

Height display resolution

0.01 nm

Width display resolution

0.1 nm

Surface topography repeatability

0.08 nm*5

Repeatability of RMS

0.008 nm*5

Spectral interference film thickness measurement

Repeatability σ

0.1 nm*5

Accuracy

±0.6%*5

Optical observation

Number of pixels

5.6 million

Revolver

6-hole electric revolver

Ring illumination lens

2.5×, 5×, 10×

Optical zoom

1 to 8×

XY stage configuration

Manual operation range

70 × 70 mm 2.76” × 2.76”

Motorized operation range

100 × 100 mm 3.94” × 3.94”

Power supply

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature

+15 to 28°C 59 to 82.4°F

Relative humidity

20 to 80% RH (No condensation)

Weight

Approx. 3 kg

*1 When using a 23-inch full-screen display.
*2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan measurement pitch is within 0.1 μm.
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice.
*4 When measuring a standard sample with a 20× or greater lens.
*5 Typical values under the default measurement environment.

All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.

If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.

In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.

PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.

Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.

PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

Trusted By

"Fast service for obsolete parts"

Increasingly PLC/ HMI control platforms are becoming obsolete and parts are no longer supported, however PLC Direct had the HMI we needed and fast shipping for our system to get back online!

Buyer at GE Health

"Helping us move projects forward"

With supply chain issues increasingly affecting our business, PLC Direct has been there for us to supply the PLC products we need, when we need it. If they don't have it readily available, they find it and provide it quickly and reliably. This has helped us move forward with several projects that would have otherwise taken us many, many months to complete.

Buyer at E-Merge Systems – A Rockwell Integrator

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