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Specifications
Model |
LM-X100T |
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Type |
Head |
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Image sensor |
1", 20-megapixel monochrome CMOS |
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Receiver lens |
Double telecentric lens |
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Image measurement |
Field of view |
Wide-field measurement mode |
325 mm × 175 mm 12.80" × 6.89" |
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High-precision measurement mode |
306 mm × 156 mm 12.05" × 6.14" |
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Minimum display unit |
0.1 μm |
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Repeatability |
Inside camera's field of view (2σ) |
Wide-field measurement mode |
±0.5 μm |
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High-precision measurement mode |
±0.1 μm |
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With stage movement |
X/Y axis |
±0.9 μm |
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X/Y plane | ||||
Measurement accuracy |
Inside camera's field of view (2σ) |
Wide-field measurement mode |
±2 μm *1 |
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High-precision measurement mode |
±0.7 μm *2 |
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With stage movement |
X/Y axis (EUX,MPE , EUY,MPE) |
±(1.8 + 0.02 L) μm *3 |
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X/Y plane (EUXY,MPE) |
±(2.8 + 0.02 L) μm *3 |
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AF height measurement |
Repeatability |
±2 μm |
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Measurement accuracy (EUZ,MPE) |
±(4.8 + 0.04 L) μm *4 |
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Touch probe measurement |
Measurable range (X/Y) |
248 mm × 141 mm 9.76" × 5.55" |
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Measuring force |
0.015 N *5 |
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Minimum display unit |
0.1 μm |
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Repeatability |
X/Y axis |
±1.4 μm |
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X/Y plane | ||||
Z-axis | ||||
Measurement accuracy |
X/Y axis (EUX,MPE EUY,MPE) |
±(2.8 + 0.02 L) μm *6 |
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X/Y plane (EUXY,MPE) |
±(3.8 + 0.02 L) μm *6 |
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Z axis (EUZ,MPE) |
±(4.8 + 0.04 L) μm *4 |
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External remote input |
Non-voltage input (with and without contact) |
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External output |
OK/NG/FAIL/MEAS. |
PhotoMOS output |
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Illumination system |
Transparent |
Telecentric transparent green LED illumination |
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Ring |
Four division, multi-angle color LED/ white LED illumination (electric) |
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External illumination control |
Intensity control |
PWM control, 100 kHz |
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Output voltage |
12 VDC |
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Output current |
1.6 A (max.) |
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XY stage |
Moving range |
300 mm × 150 mm 11.81" × 5.91" |
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Withstand load |
7 kg 15.43 lb |
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Z stage |
Moving range |
75 mm 2.95" (electric) |
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Power supply |
Power voltage |
100 to 240 VAC ±10% (50/60 Hz) |
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Power consumption |
150 VA or less |
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Environmental resistance |
Ambient temperature |
+10 to 35°C +50 to 95°F *7 |
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Relative humidity |
20 to 80% RH (no condensation) |
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Overvoltage category |
ll |
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Pollution degree |
2 |
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Weight |
Approx. 34 kg 74.96 lb |
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*1 In the range of 20 mm × 20 mm 0.79" × 0.79", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position | ||||
All PLC Direct products come with a 1-year warranty. The warranty is issued by PLC Direct. Warranty coverage commences at the date of purchase. The warranty is for mechanical defects or failures not caused by human factors including but not limited to (a) incorrect installation, (b) operating the unit in sub-optimal conditions or in scenarios not recommended by the manufacturer, (c) poor unit maintenance, etc. The warranty does not cover programming or software related issues.
If the product is eligible for PLC Direct’s warranty coverage and the customer encounters an issue with the product, we will request the item is shipped to us for diagnosis and examination. Regardless of the cause of product issues, the customer will bear responsibility for the cost of shipping the unit to PLC Direct for evaluation. Where the unit was damaged by human factors, we will offer a repair or replace quote; in cases where damage was caused by human factors, the customer is responsible for the cost of shipping the repaired/replaced unit from PLC Direct to the customer. Where the unit was not damaged by human factors but is covered by PLC Direct’s warranty, we will repair or replace the unit at our cost (or, in rare cases, refund you your purchase); in such cases, PLC Direct will bear the cost of shipping the repaired or replaced product back to the customer. It is up to PLC Direct’s discretion whether to repair, replace, or refund the customer in such cases. Diagnoses can take time to complete based on technician availability and the complexity of diagnosis.
In no event shall PLC Direct be liable for any damages except actual damages up to, but not exceeding, the amount paid to us for the product, including we shall not be liable for any consequential or indirect damages or lost profits whether or not advised of same.
PLC Direct offers free shipping worldwide. Product ship from a various warehouses worldwide based on the customer's and the product's location. The estimated delivery date on the product page is PLC Direct's best estimated assuming a US-based shipping destination.
Regardless of where the product is shipping from, PLC Direct covers all duties for US-based shipping destinations. For non-US-based shipping destinations, customers are responsible for duties as appropriate.
PLC Direct's focus is on balancing price with lead time. Some but not all products can be expedited. If you have questions about delivery ETAs, please contact our team.

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