


Specifications
Model |
XM-T1000 |
|||
Type |
Measuring unit (2 probes) |
|||
Camera |
Image pickup device |
4 megapixel CMOS image sensor |
||
Wavelength at light receiving center |
Near-infrared |
|||
Measuring range |
300 mm × 250 mm × 150 mm 11.81" × 9.84" × 5.91" |
|||
Min. display unit |
Distance |
1 µm |
||
Angle |
0.0001 degrees |
|||
Measurement accuracy |
Repeatability |
Stage locked: ±3 µm |
||
Indication error |
Stage locked: ±8 µm*1 |
|||
Stage |
Withstand load |
25 kg |
||
X-axis movable range |
- |
|||
Rotation range | ||||
Probe |
No. of probes |
2 |
||
Stage marker |
No. of markers |
- |
||
Marker light source | ||||
Probe connection port |
2 inputs |
|||
Console input |
Dedicated console |
|||
External remote input |
Non-voltage input (with and without tangent point): 2 inputs |
|||
Interfaces |
Communication (external communication) |
USB 2.0 Series A: 3 ports |
||
Display |
Built-in display |
15" LCD monitor (1024 × 768) |
||
Environmental resistance |
Ambient temperature |
+10 to +35 °C 50 to 95 °F |
||
Relative humidity |
20 to 80 % RH (No condensation) |
|||
Power supply |
Power supply voltage |
Supplied from controller |
||
Connector type |
Dedicated connector |
|||
Weight |
Head: Approx. 28.2 kg (including camera and cable) |
|||
*1 In reference to ISO 10360-2 (within the range of 200 × 200 × 150 mm 7.87" × 7.87" × 5.91" at an operating ambient temperature of 23 ±1°C 73.4 ±1.8°F) | ||||

Specifications
Model |
XM-T1200 |
|||
Type |
Measuring unit (2 probes) |
|||
Camera |
Image pickup device |
4 megapixel CMOS image sensor |
||
Wavelength at light receiving center |
Near-infrared |
|||
Measuring range |
600 mm × 300 mm × 200 mm 23.62" × 11.81" × 7.87" |
|||
Min. display unit |
Distance |
1 µm |
||
Angle |
0.0001 degrees |
|||
Measurement accuracy |
Repeatability |
Stage locked: ±3 µm |
||
Indication error |
Stage locked: ±8 µm*1 |
|||
Stage |
Withstand load |
25 kg |
||
X-axis movable range |
±100 mm ±3.94" |
|||
Rotation range |
±60° |
|||
Probe |
No. of probes |
2 |
||
Stage marker |
No. of markers |
6 |
||
Marker light source |
Near-infrared LED (870 nm) |
|||
Probe connection port |
2 inputs |
|||
Console input |
Dedicated console |
|||
External remote input |
Non-voltage input (with and without tangent point): 2 inputs |
|||
Interfaces |
Communication (external communication) |
USB 2.0 Series A: 3 ports |
||
Display |
Built-in display |
15" LCD monitor (1024 × 768) |
||
Environmental resistance |
Ambient temperature |
+10 to +35 °C 50 to 95 °F |
||
Relative humidity |
20 to 80 % RH (No condensation) |
|||
Power supply |
Power supply voltage |
Supplied from controller |
||
Connector type |
Dedicated connector |
|||
Weight |
Head: Approx. 39.6 kg (including camera and cable) |
|||
*1 In reference to ISO 10360-2 (within the range of 200 × 200 × 150 mm 7.87" × 7.87" × 5.91" at an operating ambient temperature of 23 ±1°C 73.4 ±1.8°F) | ||||

Specifications
Model |
XM-T2000 |
|||
Type |
Measuring unit |
|||
Camera |
Image pickup device |
4 megapixel CMOS image sensor |
||
Wavelength at light receiving center |
Near-infrared |
|||
Measuring range |
300 mm × 250 mm × 150 mm 11.81" × 9.84" × 5.91" |
|||
Min. display unit |
Distance |
1 μm |
||
Angle |
0.0001 degrees |
|||
Measurement accuracy |
Repeatability |
Stage locked: ±3 μm |
||
Indication error |
Stage locked: ±8 μm *1 |
|||
Stage |
Withstand load |
25 kg |
||
X-axis movable range |
- |
|||
Rotation range | ||||
Probe |
No. of probes |
2 |
||
Stage marker |
No. of markers |
- |
||
Marker light source | ||||
Probe connection port |
2 inputs |
|||
Console input |
Dedicated console |
|||
External remote input |
Non-voltage input (contact/non-contact): 2 inputs |
|||
Interfaces |
Communication (external communication) |
USB 2.0 Series A: 3 ports |
||
Display |
Built-in display |
15" LCD monitor (1024 × 768) |
||
Power supply |
Power voltage |
Supplied from controller |
||
Connector type |
Dedicated connector |
|||
Environmental resistance |
Ambient temperature |
+10 to +35°C 50 to 95°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Weight |
Head: Approx. 28.2 kg (including camera and cable) |
|||
*1 In reference to ISO 10360-2 (within the range of 200 × 200 × 150 mm 7.87" × 7.87" × 5.91" at an operating ambient temperature of 23 ±1°C 73.4 ± 33.8°F) | ||||

Specifications
Model |
XM-T2200 |
|||
Type |
Measuring unit |
|||
Camera |
Image pickup device |
4 megapixel CMOS image sensor |
||
Wavelength at light receiving center |
Near-infrared |
|||
Measuring range |
600 mm × 300 mm × 200 mm 23.62" × 11.81" × 7.87" |
|||
Min. display unit |
Distance |
1 μm |
||
Angle |
0.0001 degrees |
|||
Measurement accuracy |
Repeatability |
Stage locked: ±3 μm |
||
Indication error |
Stage locked: ±8 μm *1 |
|||
Stage |
Withstand load |
25 kg |
||
X-axis movable range |
±100 mm 3.94" |
|||
Rotation range |
±60° |
|||
Probe |
No. of probes |
2 |
||
Stage marker |
No. of markers |
6 |
||
Marker light source |
Near-infrared LED (870 nm) |
|||
Probe connection port |
2 inputs |
|||
Console input |
Dedicated console |
|||
External remote input |
Non-voltage input (contact/non-contact): 2 inputs |
|||
Interfaces |
Communication (external communication) |
USB 2.0 Series A: 3 ports |
||
Display |
Built-in display |
15" LCD monitor (1024 × 768) |
||
Power supply |
Power voltage |
Supplied from controller |
||
Connector type |
Dedicated connector |
|||
Environmental resistance |
Ambient temperature |
+10 to +35°C 50 to 95°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Weight |
Head: Approx. 39.6 kg (including camera and cable) |
|||
*1 In reference to ISO 10360-2 (within the range of 200 × 200 × 150 mm 7.87" × 7.87" × 5.91" at an operating ambient temperature of 23 ±1°C 73.4 ± 33.8°F) | ||||







Specifications
Model |
XT-024 |
|||
Type |
24‑mm 0.94" type |
|||
Image Sensor |
Monochrome CMOS image sensor |
|||
Display Size (3D) |
Type |
3072 × 3072 (1536 × 1536) pixels |
||
XY Data Interval |
7.85 µm (15.7 µm) |
|||
Display Size (2D) |
Type |
3072 × 3072 (1536 × 1536) pixels |
||
XY Data Interval |
7.85 µm (15.7 µm) |
|||
XYZ Repeatability (σ) |
0.5 µm*1*2 |
|||
Measurement Accuracy |
Height Difference |
±10 µm*3 |
||
Width | ||||
Shutter Speed |
50 µs to 200 ms |
|||
Field of View XY |
Near Side |
24.1 × 24.1 mm 0.95" × 0.95" |
||
Reference Distance | ||||
Far Side | ||||
Z Range (via Reference Distance) |
±2 mm ±0.08" |
|||
WD (to Reference Plane) |
200 mm 7.87" |
|||
Light Source |
LEDs (red, green and blue) can be set individually across 100 levels |
|||
Connected to |
XG-X2902/X2802 |
|||
Display |
LED display |
Power supply/Operation mode |
||
Ratings |
Power voltage |
24 VDC ±10% |
||
Power consumption |
3 A |
|||
Environmental resistance |
Ambient temperature |
0°C to 40°C 32 to 104°F |
||
Relative humidity |
85%RH or less (No condensation) |
|||
Dimensions |
286 × 286 × 286 mm 11.26" × 11.26" × 11.26" |
|||
Weight |
9.7 kg |
|||
*1 3×3 mean filter, using KEYENCE reference workpiece (binning ON) | ||||

Specifications
Model |
XT-060 |
|||
Type |
60‑mm 2.36" type |
|||
Image Sensor |
Monochrome CMOS image sensor |
|||
Display Size (3D) |
Type |
3072 × 3072 (1536 × 1536) pixels |
||
XY Data Interval |
19.6 µm (39.2 µm) |
|||
Display Size (2D) |
Type |
3072 × 3072 (1536 × 1536) pixels |
||
XY Data Interval |
19.6 µm (39.2 µm) |
|||
XYZ Repeatability (σ) |
1 µm*1*2 |
|||
Measurement Accuracy |
Height Difference |
±20 µm*3 |
||
Width | ||||
Shutter Speed |
50 µs to 200 ms |
|||
Field of View XY |
Near Side |
60.2 × 60.2 mm 2.37" × 2.37" |
||
Reference Distance | ||||
Far Side | ||||
Z Range (via Reference Distance) |
±6 mm ±0.24" |
|||
WD (to Reference Plane) |
200 mm 7.87" |
|||
Light Source |
LEDs (red, green and blue) can be set individually across 100 levels |
|||
Connected to |
XG-X2902/X2802 |
|||
Display |
LED display |
Power supply/Operation mode |
||
Ratings |
Power voltage |
24 VDC ±10% |
||
Power consumption |
3 A |
|||
Environmental resistance |
Ambient temperature |
0°C to 40°C 32 to 104°F |
||
Relative humidity |
85%RH or less (No condensation) |
|||
Dimensions |
286 × 286 × 286 mm 11.26" × 11.26" × 11.26" |
|||
Weight |
10.1 kg |
|||
*1 3×3 mean filter, using KEYENCE reference workpiece (binning ON) | ||||
