
Specifications
Model |
SC-S11 |
|||
Response time |
25 ms (safety output ON to OFF, IEC/EN60204-1 stop category 0), 70 ms (safety output OFF to ON) |
|||
Safety output (S-OUTPUT) |
Output |
Two PNP outputs |
||
Max. load current |
500 mA |
|||
Residual voltage (when ON) |
2.5 V maximum (with a load current of 500 mA) |
|||
Leakage current |
1.2 mA maximum |
|||
Max. capacitive load |
2.2 µF (with a load resistance of 100 Ω) |
|||
Load wiring length |
30 m maximum |
|||
Safety input (S-INPUT, enable input) |
Input type |
Contact output device connection or PNP output device connection |
||
Short-circuit current |
Approx 5mA |
|||
ON/OFF voltage |
Voltage when product turned on: 19 V or more, voltage when product turned off: 5 V or less |
|||
Wiring length |
30 m maximum |
|||
Safety related input |
Input type |
Non-voltage contact input (EDM input, reset input) |
||
Short-circuit current |
EDM input: Approx. 10 mA, Reset input: Approx. 5 mA (EDM input, reset input) |
|||
Wiring length |
30 m max. (EDM input, reset input) |
|||
Non-safety output |
Output |
PNP/NPN totem pole output (auxiliary output, lockout output) |
||
Max. load current |
50mA (auxiliary output, lockout output) |
|||
Load wiring length |
10 m maximum (auxiliary output, lockout output) |
|||
Non-safety input |
Input type |
No-voltage contact input or PNP or NPN open-collector input (external off input) |
||
Short-circuit current |
Approx 5mA (external off input) |
|||
ON/OFF voltage |
Voltage when product turned on: 5 V or less or 19 V or more, voltage when product turned off: open or 9 V to 15 V (external off input) |
|||
Wiring length |
10 m maximum (external off input) |
|||
Protection circuit |
Power supply reverse polarity protection, overcurrent protection for each output, short-circuit protection , surge protection |
|||
Approved standards |
EMC |
EMS |
IEC 61496-1, EN61496-1, UL61496-1 |
|
EMI |
EN55011 Class A, FCC Part 15 Class A, ICES-003 Issue 4 Class A |
|||
Safety |
ISO13849-1:2015 (category 4, PLe), UL1998, IEC/EN61496-1, UL508,*1 |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
1.3 A (at maximum load) |
|||
Environmental resistance |
Enclosure rating |
IP20 (IEC60529) |
||
Pollution degree |
2 (IEC60664/EN50178) |
|||
Overvoltage category |
2 (IEC60664, EN50178) |
|||
Insulation resistance |
100 MΩ or more (tested with a 500 VDC megger) between the internal circuit and the external case |
|||
Operating ambient temperature |
-10 to +55 °C 14 to 131 °F (No freezing) |
|||
Operating relative humidity |
35 to 85 % RH (No condensation) |
|||
Storage temperature |
-20 to +65 °C -4 to 149 °F (No freezing) |
|||
Storage relative humidity |
35 to 85 % RH |
|||
Withstand voltage |
1,500 VAC, 50/60 Hz for 1 minute between the internal circuit and the external case |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.7 mm 0.03", 20 sweeps in each of the X, Y, and Z directions |
|||
Shock resistance |
100 m/s2 (Approx. 10 G), 16 ms pulse, 1,000 times in each of the X, Y, and Z directions |
|||
Material |
Main unit case |
Polycarbonate (UL94-V2) |
||
Weight |
160 g or less |
|||
*1 The following mark is displayed on the ratings indication label on the side of the main unit to identify it as a UL508-certified product. | ||||

Specifications
Model |
SH-108 |
|||
Type |
Oil-resistant*1 Shielded Threaded |
|||
Shape |
M8×25 Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
10 x 10 mm 0.39" x 0.39"*2 |
|||
Stable detecting range |
0 to 2 mm 0.08" |
|||
Maximum detecting distance |
3.5 mm 0.14" |
|||
Repeatability |
0.002 mm 0.00008"*2 |
|||
Hysteresis |
0.05 mm 0.002"*2 |
|||
Temperature characteristics |
0.2%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
Oil-resistant |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 45 g |
|||
*1 Not designed for immersed use. | ||||

Specifications
Model |
SH-110 |
|||
Type |
Standard Shielded Threaded |
|||
Shape |
M10×18 Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
10 x 10 mm 0.39" x 0.39"*1 |
|||
Stable detecting range |
0 to 2 mm 0.08" |
|||
Maximum detecting distance |
5 mm 0.20" |
|||
Repeatability |
0.002 mm 0.00008"*1 |
|||
Hysteresis |
0.01 mm 0.0004"*1 |
|||
Temperature characteristics |
0.08%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 55 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-114 |
|||
Type |
Standard Shielded Threaded |
|||
Shape |
M14×18 Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
15 x 15 mm 0.59" x 0.59"*1 |
|||
Stable detecting range |
0 to 5 mm 0.20" |
|||
Maximum detecting distance |
10 mm 0.39" |
|||
Repeatability |
0.002 mm 0.00008"*1 |
|||
Hysteresis |
0.015 mm 0.0006"*1 |
|||
Temperature characteristics |
0.04%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 63 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-290*1 |
|||
Type |
Standard Non-shielded Cylindrical |
|||
Shape |
ø90×30 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
150 x 150 mm |
|||
Stable detecting range |
0 to 35 mm 1.38" |
|||
Maximum detecting distance |
70 mm 2.76" |
|||
Repeatability |
0.03 mm 0.001"*2 |
|||
Hysteresis |
0.1 mm 0.004"*2 |
|||
Temperature characteristics |
0.08%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 650 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-302*1 |
|||
Type |
Standard Shielded Cylindrical |
|||
Shape |
ø2.8×12 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
5 x 5 mm 0.20"*2 |
|||
Stable detecting range |
0 to 0.6 mm 0.02" |
|||
Maximum detecting distance |
1.6 mm 0.06" |
|||
Repeatability |
0.001 mm 0.00004"*2 |
|||
Hysteresis |
0.03 mm 0.001"*2 |
|||
Temperature characteristics |
0.3%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 30 g |
|||
*1 The SH-302 cannot be used in combination with the EG-547. | ||||

Specifications
Model |
SH-303A |
|||
Type |
Standard Shielded Cylindrical |
|||
Shape |
ø3.8×18 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
5 x 5 mm 0.20"*1 |
|||
Stable detecting range |
0 to 0.8 mm 0.03" |
|||
Maximum detecting distance |
2 mm 0.08" |
|||
Repeatability |
0.001 mm 0.00004"*1 |
|||
Hysteresis |
0.05 mm 0.002"*1 |
|||
Temperature characteristics |
0.3%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 35 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-305 |
|||
Type |
Standard Shielded Cylindrical |
|||
Shape |
ø5.4×18 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
5 x 5 mm 0.20"*1 |
|||
Stable detecting range |
0 to 1 mm 0.04" |
|||
Maximum detecting distance |
3 mm 0.12" |
|||
Repeatability |
0.001 mm 0.00004"*1 |
|||
Hysteresis |
0.01 mm 0.0004"*1 |
|||
Temperature characteristics |
0.08%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 45 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-308 |
|||
Type |
Standard Shielded Cylindrical |
|||
Shape |
ø8×18 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
10 x 10 mm 0.39" x 0.39"*1 |
|||
Stable detecting range |
0 to 2 mm 0.08" |
|||
Maximum detecting distance |
5 mm 0.20" |
|||
Repeatability |
0.002 mm 0.00008"*1 |
|||
Hysteresis |
0.01 mm 0.0004"*1 |
|||
Temperature characteristics |
0.08%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 55 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-416 |
|||
Type |
Standard Non-shielded Cylindrical & Threaded |
|||
Shape |
ø14.5×20 Cylindrical + Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
20 x 20 mm 0.79" x 0.79"*1 |
|||
Stable detecting range |
0 to 6 mm 0.24" |
|||
Maximum detecting distance |
15 mm 0.59" |
|||
Repeatability |
0.005 mm 0.0002"*1 |
|||
Hysteresis |
0.015 mm 0.0006"*1 |
|||
Temperature characteristics |
0.08%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 73 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-422*1 |
|||
Type |
Standard Non-shielded Cylindrical & Threaded |
|||
Shape |
ø22×35 Cylindrical + Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
25 x 25 mm 0.98" x 0.98"*2 |
|||
Stable detecting range |
0 to 9 mm 0.35" |
|||
Maximum detecting distance |
22 mm 0.87" |
|||
Repeatability |
0.008 mm 0.0003"*2 |
|||
Hysteresis |
0.02 mm 0.0008"*2 |
|||
Temperature characteristics |
0.08%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 195 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-430*1 |
|||
Type |
Standard Non-shielded Cylindrical & Threaded |
|||
Shape |
ø30×45 Cylindrical + Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
30 x 30 mm 1.18" x 1.18"*2 |
|||
Stable detecting range |
0 to 12 mm 0.47" |
|||
Maximum detecting distance |
30 mm 1.18" |
|||
Repeatability |
0.01 mm 0.0004"*2 |
|||
Hysteresis |
0.03 mm 0.001"*2 |
|||
Temperature characteristics |
0.08%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 225 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-440*1 |
|||
Type |
Standard Non-shielded Cylindrical & Threaded |
|||
Shape |
ø40×55 Cylindrical + Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
40 x 40 mm 1.57"*2 |
|||
Stable detecting range |
0 to 18 mm 0.71" |
|||
Maximum detecting distance |
40 mm 1.57" |
|||
Repeatability |
0.015 mm 0.0006"*2 |
|||
Hysteresis |
0.05 mm 0.0002"*2 |
|||
Temperature characteristics |
0.08%/°C*2 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 280 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-614A |
|||
Type |
Standard Shielded Thin |
|||
Shape |
14×30×4.8 Thin |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
15 x 15 mm 0.59" x 0.59"*1 |
|||
Stable detecting range |
0 to 5 mm 0.20" |
|||
Maximum detecting distance |
10 mm 0.39" |
|||
Repeatability |
0.002 mm 0.00008"*1 |
|||
Hysteresis |
0.015 mm 0.0006"*1 |
|||
Temperature characteristics |
0.04%/°C*1 |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient temperature |
-10 to +60 °C 14 to 140 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 60 g |
|||
*1 Above values obtained when the detecting distance is set at 50% of the maximum stable detecting distance. | ||||

Specifications
Model |
SH-809*1 |
|||
Type |
Heat-resistant*2 Shielded Cylindrical |
|||
Shape |
ø9.4×18 Cylindrical |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
15 x 15 mm 0.59" x 0.59"*3 |
|||
Stable detecting range |
0.5 to 2 mm |
|||
Maximum detecting distance |
― |
|||
Repeatability |
0.002 mm |
|||
Hysteresis |
0.04 mm 0.002"*3 |
|||
Temperature characteristics |
0.2%/°C*3 |
|||
Environmental resistance |
Enclosure rating |
Heat-resistant |
||
Ambient temperature |
-10 to +200 °C 14 to 392 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 55 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-816*1 |
|||
Type |
Heat-resistant*2 Shielded Threaded |
|||
Shape |
M16×20 Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
20 x 20 mm 0.79" x 0.79"*3 |
|||
Stable detecting range |
1 to 4 mm |
|||
Maximum detecting distance |
― |
|||
Repeatability |
0.005 mm 0.0002"*3 |
|||
Hysteresis |
0.04 mm 0.002"*3 |
|||
Temperature characteristics |
0.2%/°C*3 |
|||
Environmental resistance |
Enclosure rating |
Heat-resistant |
||
Ambient temperature |
-10 to +200 °C 14 to 392 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 83 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SH-822*1 |
|||
Type |
Heat-resistant*2 Non-shielded Cylindrical & |
|||
Shape |
ø22×35 Cylindrical + Threaded |
|||
Detectable object |
Ferrous metal (see Characteristics for nonferrous metals) |
|||
Standard target (iron, t=1 mm 0.04") |
30 x 30 mm 1.18" x 1.18"*3 |
|||
Stable detecting range |
2 to 8 mm |
|||
Maximum detecting distance |
― |
|||
Repeatability |
0.008 mm 0.0003"*3 |
|||
Hysteresis |
0.04 mm 0.002"*3 |
|||
Temperature characteristics |
0.2%/°C*3 |
|||
Environmental resistance |
Enclosure rating |
Heat-resistant |
||
Ambient temperature |
-10 to +200 °C 14 to 392 °F (No freezing) |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 170 g |
|||
*1 The EG-547(W) cannot be used in combination with SH-422, 430, 440, 290, 809, 816 and 822. | ||||

Specifications
Model |
SI-F01 |
|||
Type |
Micro-head type Sensor head |
|||
Measurement range |
0.05 to 1.1 mm 0.002" to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
IP67 |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +85 °C 32 to 185 °F |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Material |
SUS |
|||
Material |
Sensor head |
|||
Spectrum unit |
Polycarbonate |
|||
Weight |
Approx. 24 g (including cable) |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F01U |
|||
Type |
Micro-head type Spectrum unit |
|||
Measurement range |
0.05 to 1.1 mm 0.002 to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.2 µm ±0.000008" *4 |
|||
Resolution |
0.001 µm *5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
- |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F01U3 |
|||
Measurement range |
0.05 to 1.1 mm 0.002 to 0.04" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø20 µm ø0.000787"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 650 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
||
Ambient temperature |
0 to +35 °C 32 to 95 °F |
|||
Relative humidity |
35 to 80 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Material |
Polycarbonate |
|||
Weight |
Approx. 1 kg |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F10 |
|||
Type |
Long distance type Sensor head |
|||
Measurement range |
11.3 to 12.35 mm 0.44" to 0.49" *1 |
|||
Light source |
Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
Spot diameter |
ø40 µm ø0.001575"*3 |
|||
Linearity |
±0.3 µm ±0.000012"*4 |
|||
Resolution |
0.25 µm 0.00000984"*5 |
|||
Sampling cycle |
200 µs |
|||
Light source for guide |
Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2) |
|||
LED display |
Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange. |
|||
Temperature fluctuation |
0.01% of F.S./°C |
|||
Environmental resistance |
Enclosure rating |
IP64 |
||
Ambient light |
Incandescent lamp or Fluorescent lamp: 10,000 lux max. |
|||
Ambient temperature |
0 to +40 °C 32 to 104 °F |
|||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions |
|||
Material |
SUS |
|||
Material |
Sensor head |
|||
Spectrum unit |
Polycarbonate |
|||
Weight |
Approx. 38 g (including cable) |
|||
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01". | ||||

Specifications
Model |
SI-F1001*1 |
|||
Type |
Main Controller Separate type*2 |
|||
No. of connectable spectrum units |
2 |
|||
Display |
Minimum display unit |
0.001 µm |
||
Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
|||
Display cycle |
10 times/sec. |
|||
Terminal block |
Laser remote interlock input |
Non-voltage input*3 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*3 |
|||
Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*3 |
|||
Alarm output |
NPN open-collector output (N.C.)*3 |
|||
General comparator output |
NPN open-collector output*3 |
|||
Expansion connector |
TIMING2 input |
Non-voltage input*3 |
||
RESET input | ||||
Auto-zero input | ||||
Program switch input |
Non-voltage input x 3 inputs*3 |
|||
Alarm output |
NPN open-collector output (N.C.)*3 |
|||
Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*3 |
||
Strobe output |
NPN open-collector output*3 |
|||
Binary selection output | ||||
Binary selection input |
Non-voltage input*3 |
|||
RS-232C interface |
Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) |
|||
USB interface |
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) |
|||
Ethernet interface |
100Base-TX/10Base-T |
|||
Major functions |
12 Out simultaneous measurement |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*4 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 600 g |
|||
*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). | ||||

Specifications
Model |
SI-F1001V |
|||
Separate type |
SI-F1001/SI-FD500 |
|||
Type |
Built-in main controller type |
|||
No. of connectable spectrum units |
2 |
|||
Display |
Minimum display unit |
0.001 µm |
||
Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
|||
Display cycle |
10 times/sec. |
|||
Terminal block |
Laser remote interlock input |
Non-voltage input*1 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*1 |
|||
Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1 |
|||
Alarm output |
NPN open-collector output (N.C.)*1 |
|||
General comparator output |
NPN open-collector output*1 |
|||
Expansion connector |
TIMING2 input |
Non-voltage input*1 |
||
RESET input | ||||
Auto-zero input | ||||
Program switch input |
Non-voltage input x 3 inputs*1 |
|||
Alarm output |
NPN open-collector output (N.C.)*1 |
|||
Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*1 |
||
Strobe output |
NPN open-collector output*1 |
|||
Binary selection output | ||||
Binary selection input |
Non-voltage input*1 |
|||
RS-232C interface |
Measured data output and control input/output (Baud rate selectable to 115,200 bps max.) |
|||
USB interface |
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible) |
|||
Ethernet interface |
100Base-TX/10Base-T |
|||
Major functions |
12 Out simultaneous measurement |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*2 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 600 g |
|||
*1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max. | ||||

Specifications
Model |
SI-F1003*1 |
|||
Type |
Main Controller Separate type*2 |
|||
No. of connectable spectrum units |
2 |
|||
Display |
Minimum display unit |
0.001 µm |
||
Display range |
±999.999 µm to ±9999.99 mm (7 settings selectable) |
|||
Display cycle |
10 times/sec |
|||
Terminal block |
Laser remote interlock input |
Non-voltage or voltage input *3.*4 |
||
TIMING1 input | ||||
RESET1 input | ||||
Auto-zero1 input | ||||
Laser control input | ||||
Analog voltage output |
±10 V x 2 outputs, Output impedance: 100 Ω*4 |
|||
Analog current output |
4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*4 |
|||
Alarm output |
NPN open-collector output (N.C.)*4 |
|||
General comparator output |
NPN open-collector output *5*4 |
|||
Expansion connector |
TIMING2 input |
Non-voltage or voltage input *3.*4 |
||
RESET input | ||||
Auto-zero input | ||||
Program switch input |
Non-voltage input x 3 inputs*4 |
|||
Alarm output |
NPN open-collector output (N.C.)*4 |
|||
Comparator/ binary output |
Binary output |
Measured value data output (21 bits) OUT selectable NPN open-collector output*4 |
||
Strobe output |
NPN open-collector output *5*4 |
|||
Binary selection output | ||||
Binary selection input |
Non-voltage or voltage input *3.*4 |
|||
RS-232C interface |
Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable) |
|||
USB interface |
In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible) |
|||
Ethernet interface |
100BASE-TX/10BASE-T |
|||
Major functions |
12 Out simultaneous measurementcalculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,interferometer mode, mask, connection of setting support software, etc. |
|||
Rating |
Power voltage |
24 VDC ±10 %, Ripple (P-P) 10 % or less |
||
Current consumption |
One head connected: 0.6 A or less. Six heads connected: 1.5 A or less. |
|||
Environmental resistance |
Ambient temperature |
0 to +50 °C 32 to 122 °F*6 |
||
Relative humidity |
35 to 85 % RH (No condensation) |
|||
Vibration resistance |
10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions |
|||
Weight |
Approx. 600 g |
|||
*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3). | ||||
