3D Measurement Systems
120 products
Showing 49 - 72 of 120 products

Specifications
Model |
WM-6225 |
|||
Camera unit |
Measurement range (W × D × H) |
25000 × 11000 × 12500 mm 984.25" × 433.07" × 492.13" |
||
Camera unit rotation angle |
Horizontal rotation |
±120° |
||
Vertical tilt |
±30° |
|||
Minimum display unit |
Distance |
0.001 mm 0.00004" |
||
Angle |
0.001° |
|||
External input |
2 non-voltage inputs |
|||
Communication |
WLAN communication |
IEEE 802.11 a/b/g/n/ac *1 |
||
Bluetooth communication |
Bluetooth 5.0 |
|||
USB communication |
USB 3.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Supplied from dedicated AC adapter |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
4.5 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 7.2 kg 15.87 lb |
|||
Contact probe |
Probing system accuracy |
±(28 + 5 L/1000) μm *2 |
||
Marker |
No. of markers |
7 |
||
Light source |
870 nm |
|||
Applicable stylus |
M5 |
|||
Display |
Display method |
2.7-inch transmissive TFT color LCD |
||
Resolution |
320 × 240 pixels |
|||
Touch panel |
Analog resistive |
|||
Communication |
Bluetooth communication |
Bluetooth 5.0 |
||
USB communication |
USB 2.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Battery |
Dedicated lithium-ion battery pack |
||
Capacity |
3250 mAh |
|||
Charging time |
6.5 hours |
|||
Continuous usage time |
Approx. 6 hours |
|||
Ratings |
USB connection |
Rated voltage |
5 VDC |
|
Current consumption |
1 A |
|||
Battery operation |
Rated voltage |
3.63 VDC +10%/-1% |
||
Current consumption |
1.25 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 600 g 21.18 oz (with battery inserted) |
|||
Laser-scanning probe |
Scanning system accuracy |
±(50 + 5 L/1000) μm *3 |
||
Repeatability |
0.025 mm 0.001" *4 |
|||
Working distance |
300 mm 11.81" |
|||
Depth of field |
±100 mm ±3.94" |
|||
Scan speed |
Up to 2.4 million points per second |
|||
Laser classification |
2 M |
|||
Display |
Display method |
3.5-inch transmissive TFT color LCD |
||
Resolution |
640 × 480 pixels |
|||
Touch panel |
Analog resistive |
|||
Power supply |
Supplied from dedicated cable |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
1 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 1 kg 2.20 lb |
|||
*1 With the WM-WL attached. | ||||
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Specifications
Model |
WM-6210 |
|||
Camera unit |
Measurement range (W × D × H) |
10000 × 3500 × 5000 mm 393.70" × 137.80" × 196.85" |
||
Camera unit rotation angle |
Horizontal rotation |
±120° |
||
Vertical tilt |
±30° |
|||
Minimum display unit |
Distance |
0.001 mm 0.00004" |
||
Angle |
0.001° |
|||
External input |
2 non-voltage inputs |
|||
Communication |
WLAN communication |
IEEE 802.11 a/b/g/n/ac *1 |
||
Bluetooth communication |
Bluetooth 5.0 |
|||
USB communication |
USB 3.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Supplied from dedicated AC adapter |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
4.5 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 7.2 kg 15.87 lb |
|||
Contact probe |
Probing system accuracy |
±(28 + 5 L/1000) μm *2 |
||
Marker |
No. of markers |
7 |
||
Light source |
870 nm |
|||
Applicable stylus |
M5 |
|||
Display |
Display method |
2.7-inch transmissive TFT color LCD |
||
Resolution |
320 × 240 pixels |
|||
Touch panel |
Analog resistive |
|||
Communication |
Bluetooth communication |
Bluetooth 5.0 |
||
USB communication |
USB 2.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Battery |
Dedicated lithium-ion battery pack |
||
Capacity |
3250 mAh |
|||
Charging time |
6.5 hours |
|||
Continuous usage time |
Approx. 6 hours |
|||
Ratings |
USB connection |
Rated voltage |
5 VDC |
|
Current consumption |
1 A |
|||
Battery operation |
Rated voltage |
3.63 VDC +10%/-1% |
||
Current consumption |
1.25 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 600 g 21.18 oz (with battery inserted) |
|||
Laser-scanning probe |
Scanning system accuracy |
±(50 + 5 L/1000) μm *3 |
||
Repeatability |
0.025 mm 0.001" *4 |
|||
Working distance |
300 mm 11.81" |
|||
Depth of field |
±100 mm ±3.94" |
|||
Scan speed |
Up to 2.4 million points per second |
|||
Laser classification |
2 M |
|||
Display |
Display method |
3.5-inch transmissive TFT color LCD |
||
Resolution |
640 × 480 pixels |
|||
Touch panel |
Analog resistive |
|||
Power supply |
Supplied from dedicated cable |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
1 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 1 kg 2.20 lb |
|||
*1 With the WM-WL attached. | ||||
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Specifications
Model |
WM-6010 |
|||
Camera unit |
Measurement range (W × D × H) |
10000 × 3500 × 5000 mm 393.70" × 137.80" × 196.85" |
||
Camera unit rotation angle |
Horizontal rotation |
±120° |
||
Vertical tilt |
±30° |
|||
Minimum display unit |
Distance |
0.001 mm 0.00004" |
||
Angle |
0.001° |
|||
External input |
2 non-voltage inputs |
|||
Communication |
WLAN communication |
IEEE 802.11 a/b/g/n/ac *1 |
||
Bluetooth communication |
Bluetooth 5.0 |
|||
USB communication |
USB 3.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Supplied from dedicated AC adapter |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
4.5 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 7.2 kg 15.87 lb |
|||
Contact probe |
Probing system accuracy |
±(28 + 5 L/1000) μm *2 |
||
Marker |
No. of markers |
7 |
||
Light source |
870 nm |
|||
Applicable stylus |
M5 |
|||
Display |
Display method |
2.7-inch transmissive TFT color LCD |
||
Resolution |
320 × 240 pixels |
|||
Touch panel |
Analog resistive |
|||
Communication |
Bluetooth communication |
Bluetooth 5.0 |
||
USB communication |
USB 2.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Battery |
Dedicated lithium-ion battery pack |
||
Capacity |
3250 mAh |
|||
Charging time |
6.5 hours |
|||
Continuous usage time |
Approx. 6 hours |
|||
Ratings |
USB connection |
Rated voltage |
5 VDC |
|
Current consumption |
1 A |
|||
Battery operation |
Rated voltage |
3.63 VDC +10%/-1% |
||
Current consumption |
1.25 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 600 g 21.18 oz (with battery inserted) |
|||
*1 With the WM-WL attached. | ||||
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Specifications
Model |
WM-6025 |
|||
Camera unit |
Measurement range (W × D × H) |
25000 × 11000 × 12500 mm 984.25" × 433.07" × 492.13" |
||
Camera unit rotation angle |
Horizontal rotation |
±120° |
||
Vertical tilt |
±30° |
|||
Minimum display unit |
Distance |
0.001 mm 0.00004" |
||
Angle |
0.001° |
|||
External input |
2 non-voltage inputs |
|||
Communication |
WLAN communication |
IEEE 802.11 a/b/g/n/ac *1 |
||
Bluetooth communication |
Bluetooth 5.0 |
|||
USB communication |
USB 3.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Supplied from dedicated AC adapter |
|||
Ratings |
Rated voltage |
24 VDC |
||
Current consumption |
4.5 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 7.2 kg 15.87 lb |
|||
Contact probe |
Probing system accuracy |
±(28 + 5 L/1000) μm *2 |
||
Marker |
No. of markers |
7 |
||
Light source |
870 nm |
|||
Applicable stylus |
M5 |
|||
Display |
Display method |
2.7-inch transmissive TFT color LCD |
||
Resolution |
320 × 240 pixels |
|||
Touch panel |
Analog resistive |
|||
Communication |
Bluetooth communication |
Bluetooth 5.0 |
||
USB communication |
USB 2.0 |
|||
Infrared communication |
945 nm |
|||
Power supply |
Battery |
Dedicated lithium-ion battery pack |
||
Capacity |
3250 mAh |
|||
Charging time |
6.5 hours |
|||
Continuous usage time |
Approx. 6 hours |
|||
Ratings |
USB connection |
Rated voltage |
5 VDC |
|
Current consumption |
1 A |
|||
Battery operation |
Rated voltage |
3.63 VDC +10%/-1% |
||
Current consumption |
1.25 A |
|||
Environmental resistance |
Operating ambient temperature |
0 to 40°C 32 to 104°F |
||
Operating ambient humidity |
Max. 80% RH (no condensation) |
|||
Weight |
Approx. 600 g 21.18 oz (with battery inserted) |
|||
*1 With the WM-WL attached. | ||||
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Specifications
Model |
VR-6200 |
|||
Type |
Head |
|||
Operating System |
Windows 10 Professional / Windows 11 Professional |
|||
Controller |
VR-6000 |
|||
Field of view |
Low magnification (wide field of view) |
Magnification on a 15" monitor 12× |
Horizontal |
24.0 mm 0.94" |
Vertical |
18.0 mm 0.71" |
|||
Magnification on a 15" monitor 25× |
Horizontal |
12.0 mm 0.47" |
||
Vertical |
9.0 mm 0.35" |
|||
Magnification on a 15" monitor 38× |
Horizontal |
8.0 mm 0.31" |
||
Vertical |
6.0 mm 0.24" |
|||
Magnification on a 15" monitor 50× |
Horizontal |
|||
Vertical |
4.5 mm 0.18" |
|||
High magnification (high resolution) |
Magnification on a 15" monitor 40× |
Horizontal |
7.6 mm 0.30" |
|
Vertical |
5.7 mm 0.22" |
|||
Magnification on a 15" monitor 80× |
Horizontal |
3.8 mm 0.15" |
||
Vertical |
2.9 mm 0.11" |
|||
Magnification on a 15" monitor 120× |
Horizontal |
2.5 mm 0.10" |
||
Vertical |
1.9 mm 0.07" |
|||
Magnification on a 15" monitor 160× |
Horizontal |
|||
Vertical |
1.4 mm 0.06" |
|||
Zoom |
1× to 4× |
|||
Height measurement |
Display resolution |
0.1 μm |
||
Height measurement range |
Without Z stitching |
Low magnification (wide field of view): 10 mm 0.39" |
||
With Z stitching |
Low magnification (wide field of view): 50 mm 1.97" |
|||
Repeatability (σ) |
Without Z stitching |
0.4 μm *1 |
||
With Z stitching |
1.0 μm *1 |
|||
Measurement accuracy |
Without Z stitching |
±2.5 μm *1 |
||
With Z stitching |
±4.0 μm *1 |
|||
Width measurement |
Repeatability (σ) |
Low magnification (wide field of view): 1 μm |
||
Measurement accuracy |
Low magnification (wide field of view): ±5 μm |
|||
Stitching function |
Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting *2 |
|||
Stitching function |
Motorized rotational unit |
Supported *2 |
||
XY measurable range |
300 × 150 mm 11.81" × 5.91" *2 |
|||
Stage |
XY stroke |
278 × 134 mm 10.94" × 5.28" (motorized) |
||
Z stroke |
69 mm 2.72" (motorized) |
|||
Load capacity |
4.5 kg 9.92 lb |
|||
Working distance |
75 mm 2.95" |
|||
Image receiving element |
4 megapixel monochrome CMOS |
|||
Transmitter lens |
Double-telecentric lens × 2 |
|||
Receiver lens |
Double-telecentric lens |
|||
Light sources |
Observation light source |
LED ring light (red, blue, green) |
||
Measurement light source |
White LED |
|||
Data processing |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
200 VA max. |
|||
Environmental resistance |
Ambient temperature |
+15 to 30°C +59 to 86°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Weight |
Approx. 28 kg 61.73 lb *3 |
|||
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F) | ||||
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Specifications
Model |
VR-6100 |
|||
Type |
Head |
|||
Operating System |
Windows 10 Professional / Windows 11 Professional |
|||
Controller |
VR-6000 |
|||
Field of view |
Low magnification (wide field of view) |
Magnification on a 15" monitor 12× |
Horizontal |
24.0 mm 0.94" |
Vertical |
18.0 mm 0.71" |
|||
Magnification on a 15" monitor 25× |
Horizontal |
12.0 mm 0.47" |
||
Vertical |
9.0 mm 0.35" |
|||
Magnification on a 15" monitor 38× |
Horizontal |
8.0 mm 0.31" |
||
Vertical |
6.0 mm 0.24" |
|||
Magnification on a 15" monitor 50× |
Horizontal |
|||
Vertical |
4.5 mm 0.18" |
|||
High magnification (high resolution) |
Magnification on a 15" monitor 40× |
Horizontal |
7.6 mm 0.30" |
|
Vertical |
5.7 mm 0.22" |
|||
Magnification on a 15" monitor 80× |
Horizontal |
3.8 mm 0.15" |
||
Vertical |
2.9 mm 0.11" |
|||
Magnification on a 15" monitor 120× |
Horizontal |
2.5 mm 0.10" |
||
Vertical |
1.9 mm 0.07" |
|||
Magnification on a 15" monitor 160× |
Horizontal |
|||
Vertical |
1.4 mm 0.06" |
|||
Zoom |
1× to 4× |
|||
Height measurement |
Display resolution |
0.1 μm |
||
Height measurement range |
Without Z stitching |
Low magnification (wide field of view): 10 mm 0.39" |
||
With Z stitching |
Low magnification (wide field of view): 50 mm 1.97" |
|||
Repeatability (σ) |
Without Z stitching |
0.4 μm *1 |
||
With Z stitching |
1.0 μm *1 |
|||
Measurement accuracy |
Without Z stitching |
±2.5 μm *1 |
||
With Z stitching |
±4.0 μm *1 |
|||
Width measurement |
Repeatability (σ) |
Low magnification (wide field of view): 1 μm |
||
Measurement accuracy |
Low magnification (wide field of view): ±5 μm |
|||
Stitching function |
Manual measurement (XY manual operation + Z automatic control) *2 |
|||
Stitching function |
Motorized rotational unit |
Not supported |
||
XY measurable range |
92 × 86 mm 3.62" × 3.39" *2 |
|||
Stage |
XY stroke |
70 × 70 mm 2.76" × 2.76" (manual) |
||
Z stroke |
69 mm 2.72" (motorized) |
|||
Load capacity |
4.5 kg 9.92 lb |
|||
Working distance |
75 mm 2.95" |
|||
Image receiving element |
4 megapixel monochrome CMOS |
|||
Transmitter lens |
Double-telecentric lens × 2 |
|||
Receiver lens |
Double-telecentric lens |
|||
Light sources |
Observation light source |
LED ring light (red, blue, green) |
||
Measurement light source |
White LED |
|||
Data processing |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
200 VA max. |
|||
Environmental resistance |
Ambient temperature |
+15 to 30°C +59 to 86°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Weight |
Approx. 25 kg 55.12 lb *3 |
|||
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F) | ||||
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Specifications
Model |
VR-6000 |
|||
Type |
Controller |
|||
Operating System |
Windows 10 Professional / Windows 11 Professional |
|||
Head |
VR-6200, VR-6100 |
|||
Field of view |
Low magnification (wide field of view) |
Magnification on a 15" monitor 12× |
Horizontal |
24.0 mm 0.94" |
Vertical |
18.0 mm 0.71" |
|||
Magnification on a 15" monitor 25× |
Horizontal |
12.0 mm 0.47" |
||
Vertical |
9.0 mm 0.35" |
|||
Magnification on a 15" monitor 38× |
Horizontal |
8.0 mm 0.31" |
||
Vertical |
6.0 mm 0.24" |
|||
Magnification on a 15" monitor 50× |
Horizontal |
|||
Vertical |
4.5 mm 0.18" |
|||
High magnification (high resolution) |
Magnification on a 15" monitor 40× |
Horizontal |
7.6 mm 0.30" |
|
Vertical |
5.7 mm 0.22" |
|||
Magnification on a 15" monitor 80× |
Horizontal |
3.8 mm 0.15" |
||
Vertical |
2.9 mm 0.11" |
|||
Magnification on a 15" monitor 120× |
Horizontal |
2.5 mm 0.10" |
||
Vertical |
1.9 mm 0.07" |
|||
Magnification on a 15" monitor 160× |
Horizontal |
|||
Vertical |
1.4 mm 0.06" |
|||
Zoom |
1× to 4× |
|||
Height measurement |
Display resolution |
0.1 μm |
||
Height measurement range |
Without Z stitching |
Low magnification (wide field of view): 10 mm 0.39" |
||
With Z stitching |
Low magnification (wide field of view): 50 mm 1.97" |
|||
Repeatability (σ) |
Without Z stitching |
0.4 μm *1 |
||
With Z stitching |
1.0 μm *1 |
|||
Measurement accuracy |
Without Z stitching |
±2.5 μm *1 |
||
With Z stitching |
±4.0 μm *1 |
|||
Width measurement |
Repeatability (σ) |
Low magnification (wide field of view): 1 μm |
||
Measurement accuracy |
Low magnification (wide field of view): ±5 μm |
|||
Stitching function |
VR-6200: Fully-automated measurement (XY automatic control + Z automatic control, θ automatic control), Automatic mapping creation, Automatic area setting *2 |
|||
Stitching function |
Motorized rotational unit |
VR-6200: Supported *2 |
||
XY measurable range |
VR-6200: 300 × 150 mm 11.81" × 5.91" *2 |
|||
Stage |
XY stroke |
VR-6200: 278 × 134 mm 10.94" × 5.28" (motorized) |
||
Z stroke |
69 mm 2.72" (motorized) |
|||
Load capacity |
4.5 kg 9.92 lb |
|||
Working distance |
75 mm 2.95" |
|||
Image receiving element |
4 megapixel monochrome CMOS |
|||
Transmitter lens |
Double-telecentric lens × 2 |
|||
Receiver lens |
Double-telecentric lens |
|||
Light sources |
Observation light source |
LED ring light (red, blue, green) |
||
Measurement light source |
White LED |
|||
Data processing |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
200 VA max. |
|||
Environmental resistance |
Ambient temperature |
+15 to 30°C +59 to 86°F |
||
Relative humidity |
20 to 80% RH (no condensation) |
|||
Weight |
Approx. 4 kg 8.82 lb |
|||
*1 Value obtained using KEYENCE’s specified standard gauge with measurement in KEYENCE’s specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F) | ||||
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Specifications
Model |
VL-870 |
|||
Type |
Measurement unit |
|||
Controller |
VL-800 |
|||
Stage |
VL-850, VL-830 |
|||
Optical transmitter system |
High-luminance dual projector module |
|||
Optical receiver system |
Wide dynamic range low/high magnification offset dual optical module |
|||
Light sources |
Measurement light source |
Blue LED |
||
Color texture light source |
LEDs in 3 colors (red, green, blue) |
|||
Captured data format |
Full-color texture 3D mesh data |
|||
Repeatability (σ) |
2 μm *1 |
|||
Measurement accuracy |
±10 μm *2 |
|||
Measurement resolution |
9 million measurement points |
|||
Measurement modes |
Low magnification |
High-speed/Standard/High-definition (wide field) |
||
High magnification |
Standard/High-definition (High resolution) |
|||
Measurement range |
Low magnification |
ø300 × H200 mm ø11.81" × H7.87" (wide field) |
||
High magnification |
ø70 × H50 mm ø2.76" × H1.97" (High resolution) |
|||
Extended measurement |
Automatic rotation combined measurements |
✓ |
||
Automatic XY combined measurements |
VL-850: ✓ |
|||
Automatic XY combined measurement range |
Low magnification (2 × 2 composition) |
VL-850: ø500 × H200 mm ø19.69" × H7.87" |
||
Low magnification (3 × 1 composition) |
VL-850: W580 × D300 × H200 mm W22.83" × D11.81" × H7.87" *3 |
|||
High magnification (2 × 2 composition) |
VL-850: ø110 × H50 mm ø4.33" × H1.97" |
|||
High magnification (3 × 1 composition) |
VL-850: W150 × D70 × H50 mm W5.91" × D2.76" × H1.97" *3 |
|||
Stage |
Stage configuration |
VL-850: Motorized XYθ stage mechanism |
||
Stage top panel size |
ø500 mm ø19.69" |
|||
Stage rotation |
360° (infinite rotation) |
|||
Stage movement range |
VL-850: ø200 mm ø7.87" |
|||
Tilt mechanism |
Up to 45° |
|||
Load capacity |
50 kg 110.23 lb |
|||
Control PC |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
Controller/Measurement unit: 320 VA |
|||
Environmental resistance |
Ambient temperature range |
+15 to +30°C +59 to +86°F |
||
Ambient humidity range |
20 to 80% RH (no condensation) |
|||
Weight |
Controller: 3.7 kg 8.16 lb |
|||
*1 Value when measurement is performed using the default measurement mode specified by KEYENCE and using the default standard gauge specified by KEYENCE and at an operating ambient temperature of 23°C ±1°C 73.4°F ±1.8°F | ||||
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Specifications
Model |
VL-850 |
|||
Type |
Stage |
|||
Controller |
VL-800 |
|||
Measurement unit |
VL-870 |
|||
Optical transmitter system |
High-luminance dual projector module |
|||
Optical receiver system |
Wide dynamic range low/high magnification offset dual optical module |
|||
Light sources |
Measurement light source |
Blue LED |
||
Color texture light source |
LEDs in 3 colors (red, green, blue) |
|||
Captured data format |
Full-color texture 3D mesh data |
|||
Repeatability (σ) |
2 μm *1 |
|||
Measurement accuracy |
±10 μm *2 |
|||
Measurement resolution |
9 million measurement points |
|||
Measurement modes |
Low magnification |
High-speed/Standard/High-definition (wide field) |
||
High magnification |
Standard/High-definition (High resolution) |
|||
Measurement range |
Low magnification |
ø300 × H200 mm ø11.81" × H7.87" (wide field) |
||
High magnification |
ø70 × H50 mm ø2.76" × H1.97" (High resolution) |
|||
Extended measurement |
Automatic rotation combined measurements |
✓ |
||
Automatic XY combined measurements | ||||
Automatic XY combined measurement range |
Low magnification (2 × 2 composition) |
ø500 × H200 mm ø19.69" × H7.87" |
||
Low magnification (3 × 1 composition) |
W580 × D300 × H200 mm W22.83" × D11.81" × H7.87" *3 |
|||
High magnification (2 × 2 composition) |
ø110 × H50 mm ø4.33" × H1.97" |
|||
High magnification (3 × 1 composition) |
W150 × D70 × H50 mm W5.91" × D2.76" × H1.97" *3 |
|||
Stage |
Stage configuration |
Motorized XYθ stage mechanism |
||
Stage top panel size |
ø500 mm ø19.69" |
|||
Stage rotation |
360° (infinite rotation) |
|||
Stage movement range |
ø200 mm ø7.87" |
|||
Tilt mechanism |
Up to 45° |
|||
Load capacity |
50 kg 110.23 lb |
|||
Control PC |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
Controller/Measurement unit: 320 VA |
|||
Environmental resistance |
Ambient temperature range |
+15 to +30°C +59 to +86°F |
||
Ambient humidity range |
20 to 80% RH (no condensation) |
|||
Weight |
Controller: 3.7 kg 8.16 lb |
|||
*1 Value when measurement is performed using the default measurement mode specified by KEYENCE and using the default standard gauge specified by KEYENCE and at an operating ambient temperature of 23°C ±1°C 73.4°F ±1.8°F | ||||
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Specifications
Model |
VL-830 |
|||
Type |
Stage |
|||
Controller |
VL-800 |
|||
Measurement unit |
VL-870 |
|||
Optical transmitter system |
High-luminance dual projector module |
|||
Optical receiver system |
Wide dynamic range low/high magnification offset dual optical module |
|||
Light sources |
Measurement light source |
Blue LED |
||
Color texture light source |
LEDs in 3 colors (red, green, blue) |
|||
Captured data format |
Full-color texture 3D mesh data |
|||
Repeatability (σ) |
2 μm *1 |
|||
Measurement accuracy |
±10 μm *2 |
|||
Measurement resolution |
9 million measurement points |
|||
Measurement modes |
Low magnification |
High-speed/Standard/High-definition (wide field) |
||
High magnification |
Standard/High-definition (High resolution) |
|||
Measurement range |
Low magnification |
ø300 × H200 mm ø11.81" × H7.87" (wide field) |
||
High magnification |
ø70 × H50 mm ø2.76" × H1.97" (High resolution) |
|||
Extended measurement |
Automatic rotation combined measurements |
✓ |
||
Automatic XY combined measurements |
— |
|||
Automatic XY combined measurement range |
Low magnification (2 × 2 composition) |
|||
Low magnification (3 × 1 composition) | ||||
High magnification (2 × 2 composition) | ||||
High magnification (3 × 1 composition) | ||||
Stage |
Stage configuration |
Motorized θ stage mechanism |
||
Stage top panel size |
ø500 mm ø19.69" |
|||
Stage rotation |
360° (infinite rotation) |
|||
Stage movement range |
— |
|||
Tilt mechanism |
Up to 45° |
|||
Load capacity |
50 kg 110.23 lb |
|||
Control PC |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
Controller/Measurement unit: 320 VA |
|||
Environmental resistance |
Ambient temperature range |
+15 to +30°C +59 to +86°F |
||
Ambient humidity range |
20 to 80% RH (no condensation) |
|||
Weight |
Controller: 3.7 kg 8.16 lb |
|||
*1 Value when measurement is performed using the default measurement mode specified by KEYENCE and using the default standard gauge specified by KEYENCE and at an operating ambient temperature of 23°C ±1°C 73.4°F ±1.8°F | ||||
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Specifications
Model |
VL-800 |
|||
Type |
Controller |
|||
Stage |
VL-850, VL-830 |
|||
Measurement unit |
VL-870 |
|||
Optical transmitter system |
High-luminance dual projector module |
|||
Optical receiver system |
Wide dynamic range low/high magnification offset dual optical module |
|||
Light sources |
Measurement light source |
Blue LED |
||
Color texture light source |
LEDs in 3 colors (red, green, blue) |
|||
Captured data format |
Full-color texture 3D mesh data |
|||
Repeatability (σ) |
2 μm *1 |
|||
Measurement accuracy |
±10 μm *2 |
|||
Measurement resolution |
9 million measurement points |
|||
Measurement modes |
Low magnification |
High-speed/Standard/High-definition (wide field) |
||
High magnification |
Standard/High-definition (High resolution) |
|||
Measurement range |
Low magnification |
ø300 × H200 mm ø11.81" × H7.87" (wide field) |
||
High magnification |
ø70 × H50 mm ø2.76" × H1.97" (High resolution) |
|||
Extended measurement |
Automatic rotation combined measurements |
✓ |
||
Automatic XY combined measurements |
VL-850: ✓ |
|||
Automatic XY combined measurement range |
Low magnification (2 × 2 composition) |
VL-850: ø500 × H200 mm ø19.69" × H7.87" |
||
Low magnification (3 × 1 composition) |
VL-850: W580 × D300 × H200 mm W22.83" × D11.81" × H7.87" *3 |
|||
High magnification (2 × 2 composition) |
VL-850: ø110 × H50 mm ø4.33" × H1.97" |
|||
High magnification (3 × 1 composition) |
VL-850: W150 × D70 × H50 mm W5.91" × D2.76" × H1.97" *3 |
|||
Stage |
Stage configuration |
VL-850: Motorized XYθ stage mechanism |
||
Stage top panel size |
ø500 mm ø19.69" |
|||
Stage rotation |
360° (infinite rotation) |
|||
Stage movement range |
VL-850: ø200 mm ø7.87" |
|||
Tilt mechanism |
Up to 45° |
|||
Load capacity |
50 kg 110.23 lb |
|||
Control PC |
Dedicated PC specified by KEYENCE |
|||
Power supply |
Power voltage |
100 to 240 VAC ±10%, 50/60 Hz |
||
Power consumption |
Controller/Measurement unit: 320 VA |
|||
Environmental resistance |
Ambient temperature range |
+15 to +30°C +59 to +86°F |
||
Ambient humidity range |
20 to 80% RH (no condensation) |
|||
Weight |
Controller: 3.7 kg 8.16 lb |
|||
*1 Value when measurement is performed using the default measurement mode specified by KEYENCE and using the default standard gauge specified by KEYENCE and at an operating ambient temperature of 23°C ±1°C 73.4°F ±1.8°F | ||||
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Specifications
Model |
VK-X3000 |
|||
Type |
Controller |
|||
Total magnification |
42 to 28800×*1 |
|||
Field of view |
11 to 7398 μm |
|||
Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
|||
Laser wavelength |
VK-X3100: Semiconductor laser, 404 nm |
|||
Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
|||
Max. laser output |
1.0 mW |
|||
Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
|||
Laser light-receiving element |
16-bit photomultiplier |
|||
White light source |
White LED |
|||
White-light-receiving element |
High-definition color CMOS |
|||
Laser confocal |
Height display resolution |
VK-X3100: 0.1 nm |
||
Height repeatability σ |
VK-X3100: 10×: 100 nm, 20×: 40 nm, 50×: 12 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
VK-X3100: 0.1 nm |
|||
Width repeatability 3σ |
VK-X3100: 10×: 200 nm, 20×: 100 nm, 50×: 40 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
Focus variation |
Height display resolution |
VK-X3100: 0.1 nm |
||
Height repeatability σ |
VK-X3100: 5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
VK-X3100: 0.1 nm |
|||
Width repeatability 3σ |
VK-X3100: 5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
White light interferometry |
Height display resolution |
0.01 nm |
||
Width display resolution |
0.1 nm |
|||
Surface topography repeatability |
0.08 nm*5 |
|||
Repeatability of RMS |
0.008 nm*5 |
|||
Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
||
Accuracy |
±0.6%*5 |
|||
Optical observation |
Number of pixels |
5.6 million |
||
Revolver |
6-hole electric revolver |
|||
Ring illumination lens |
2.5×, 5×, 10× |
|||
Optical zoom |
1 to 8× |
|||
XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
||
Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
|||
Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
||
Power consumption |
150 VA |
|||
Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
||
Relative humidity |
20 to 80% RH (No condensation) |
|||
Weight |
Approx. 3 kg |
|||
*1 When using a 23-inch full-screen display. | ||||
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Specifications
Model |
VK-X3100 |
|||
Type |
Measurement head |
|||
Total magnification |
42 to 28800×*1 |
|||
Field of view |
11 to 7398 μm |
|||
Measurement principle |
Laser confocal, Focus variation, White light interferometry, Spectral interference |
|||
Laser wavelength |
Semiconductor laser, 404 nm |
|||
Max. laser measurement speed |
Surface: 125 Hz, Line: 7900 Hz*2 |
|||
Max. laser output |
1.0 mW |
|||
Laser class |
Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) |
|||
Laser light-receiving element |
16-bit photomultiplier |
|||
White light source |
White LED |
|||
White-light-receiving element |
High-definition color CMOS |
|||
Laser confocal |
Height display resolution |
0.1 nm |
||
Height repeatability σ |
10×: 100 nm, 20×: 40 nm, 50×: 12 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
0.1 nm |
|||
Width repeatability 3σ |
10×: 200 nm, 20×: 100 nm, 50×: 40 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
Focus variation |
Height display resolution |
0.1 nm |
||
Height repeatability σ |
5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm |
|||
Height accuracy |
0.2+L/ 100 μm or less*4 |
|||
Width display resolution |
0.1 nm |
|||
Width repeatability 3σ |
5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm |
|||
Width accuracy |
Measured value ±2% or less*4 |
|||
White light interferometry |
Height display resolution |
0.01 nm |
||
Width display resolution |
0.1 nm |
|||
Surface topography repeatability |
0.08 nm*5 |
|||
Repeatability of RMS |
0.008 nm*5 |
|||
Spectral interference film thickness measurement |
Repeatability σ |
0.1 nm*5 |
||
Accuracy |
±0.6%*5 |
|||
Optical observation |
Number of pixels |
5.6 million |
||
Revolver |
6-hole electric revolver |
|||
Ring illumination lens |
2.5×, 5×, 10× |
|||
Optical zoom |
1 to 8× |
|||
XY stage configuration |
Manual operation range |
70 × 70 mm 2.76” × 2.76” |
||
Motorized operation range |
100 × 100 mm 3.94” × 3.94” |
|||
Power supply |
Power voltage |
100 to 240 VAC, 50/60 Hz |
||
Power consumption |
150 VA |
|||
Environmental resistance |
Ambient temperature |
+15 to 28°C 59 to 82.4°F |
||
Relative humidity |
20 to 80% RH (No condensation) |
|||
Weight |
Approx. 13 kg |
|||
*1 When using a 23-inch full-screen display. | ||||
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